Results 131 to 140 of about 11,186 (164)
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PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
2021LAUFER TIMO, STOLZ MICHAEL
openaire +7 more sources
Immersion lithography: New opportunities for semiconductor manufacturing
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 2004Timothy Brunner
exaly
Semiconductor quantum point contact fabricated by lithography with an atomic force microscope
Applied Physics Letters, 1997Thomas Heinzel, M Holland, Heinzel T
exaly
LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing
Advances in Neural Information Processing Systems 36, 2023Su Zheng +4 more
openaire +2 more sources
Nanoscale GaAs metal–semiconductor–metal photodetectors fabricated using nanoimprint lithography
Applied Physics Letters, 1999Yu Zhaoning, Chou S Y
exaly
Semiconductor lithography for the next millennium
Microelectronics Reliability, 1997openaire +1 more source

