Results 131 to 140 of about 11,186 (164)
Some of the next articles are maybe not open access.

Immersion lithography: New opportunities for semiconductor manufacturing

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 2004
Timothy Brunner
exaly  

Semiconductor quantum point contact fabricated by lithography with an atomic force microscope

Applied Physics Letters, 1997
Thomas Heinzel, M Holland, Heinzel T
exaly  

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Advances in Neural Information Processing Systems 36, 2023
Su Zheng   +4 more
openaire   +2 more sources

Semiconductor lithography for the next millennium

Microelectronics Reliability, 1997
openaire   +1 more source

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