Results 141 to 150 of about 3,881 (216)

Impact of Ions and Radicals on Etch Selectivity and Fluorocarbon Polymerization in the Selective Dry Etching of Si0.7Ge0.3

Plasma Processes and Polymers, Volume 23, Issue 6, June 2026.
Ion screening in CF4 plasma reduces CFx+ ion flux while maintaining radical fluxes, suppressing fluorocarbon polymer accumulation. This enables smooth SiGe etching with selectivity up to 30:1 in multilayer stacks. ABSTRACT Selective etching of Si0.7Ge0.3 was investigated in CF4 inductively coupled plasma using an ion‐screening approach to decouple ion ...
Joosung Kang, Yongjoon Choi, Dongmin Yoon, Jihye Kim, U‐In Chung, Jeonghoon Son, Dae‐Hong Ko   +6 more
wiley   +1 more source

Spectroscopic Ellipsometry and Correlated Studies of AlGaN-GaN HEMTs Prepared by MOCVD. [PDF]

Nanomaterials (Basel)
Yang Y, Liu Y, Li Y, Nafisa MT, Feng ZC, Wang L, Yiin J, Wan L, Klein B, Ferguson I, Sun W.   +10 more
europepmc   +1 more source

Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition. [PDF]

ACS Appl Electron Mater, 2022
Bohórquez C, Bakkali H, Delgado JJ, Blanco E, Herrera M, Domínguez M.   +5 more
europepmc   +1 more source

Enhancing Charge Transport and Extraction in Ta3N5 Photoanodes Via Ti Doping and TiN Contact Layers

Small, Volume 22, Issue 31, 2 June 2026.
Ta3N5${\rm Ta}_3{\rm N}_{5}$ is a promising photoanode for solar water splitting but suffers from poor charge transport and interfacial losses. We combine Ti compensation doping with ultrathin TiN back‐contact interlayers to suppress bulk recombination, enhance carrier mobility and lifetime, and enable efficient carrier extraction, yielding ...
Laura I. Wagner, Dominik Moser, Dennis Friedrich, Frans Munnik, Olivier Henrotte, Emiliano Cortés, Roel van de Krol, Verena Streibel, Ian D. Sharp   +8 more
wiley   +1 more source

In Situ Composition and Thickness Monitoring during (Bi_xIn_1‑x)₂Se₃ Thin Film Growth: toward Automated Synthesis Control Using Spectroscopic Ellipsometry for Quantum and Spintronic Devices. [PDF]

ACS Appl Nano Mater
Hilse M, Niedel J, Zhang Q, Richardella A, Hijazi H, Shallenberger JR, Hengstebeck R, Law S, Samarth N, Peiris FC.   +9 more
europepmc   +1 more source

Characterization and Quantification of Depletion and Accumulation Layers in Solid-State Li⁺ -Conducting Electrolytes Using In Situ Spectroscopic Ellipsometry. [PDF]

Adv Mater, 2021
Katzenmeier L, Carstensen L, Schaper SJ, Müller-Buschbaum P, Bandarenka AS.   +4 more
europepmc   +1 more source

Freestanding Polymer Metasurface Supporting Higher‐Order Optical Resonances for Strong Field Enhancement in TMD Monolayers

Small, Volume 22, Issue 35, 23 June 2026.
A freestanding polymer metasurface is developed to enhance light emission from atomically thin semiconductors. By supporting higher‐order optical resonances that concentrate electromagnetic fields at the surface, the platform significantly improves coupling between light and WS2 monolayer.
Chih‐Zong Deng, Sunhao Shi, Chun‐Hao Chiang, Mu‐Hsin Chen, Shuaicheng Liu, Haruyuki Sakurai, Jui‐Han Fu, Kuniaki Konishi, Masanobu Iwanaga, Vincent Tung, Ya‐Lun Ho   +10 more
wiley   +1 more source

Subpicosecond Spectroscopic Ellipsometry of the Photoinduced Phase Transition in VO₂ Thin Films. [PDF]

ACS Photonics
Gutiérrez Y, Vázquez-Miranda S, Espinoza S, Khakurel K, Rebarz M, Zhang Z, Saiz JM, Ramanathan S, Cueff S.   +8 more
europepmc   +1 more source

Spectroscopic Ellipsometry Characterization of As-Deposited and Annealed Non-Stoichiometric Indium Zinc Tin Oxide Thin Film. [PDF]

Materials (Basel), 2021
Janicek P, Putri M, Kim KH, Lee HJ, Bouska M, Šlang S, Lee HY.   +6 more
europepmc   +1 more source

High‐Barrier Amorphous Al2O3 Film Deposited via Magnetic Field‐Confined for Ultrastable Hygroscopic Scintillators

SmartMat, Volume 7, Issue 3, June 2026.
The moisture‐induced degradation of hygroscopic scintillators limits their performance and lifespan in radiation detection. A 100 nm amorphous Al2O3 film, deposited at room temperature via FCVA with pulsed magnetic field confinement, offers high optical transmittance and ultralow moisture permeability.
Zeyu Yin, Jiangfeng Ren, Xue Peng, Shaohua Zhang, Bin Liao, Jia Zhu, Yang Li, Shengqi Dai, Xu Zhang, Yifan Zhang, Qian Li, Qingyan Hou, Jiakun Wu, Xiao Ouyang, Xiaoping Ouyang   +14 more
wiley   +1 more source