Results 161 to 170 of about 3,881 (216)

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

open access: yesSci Rep, 2020
Kilic U   +9 more
europepmc   +1 more source

Dual-comb spectroscopic ellipsometry

open access: yesDual-comb spectroscopic ellipsometry
Spectroscopic ellipsometry is a means of investigating optical and dielectric material responses. Conventional spectroscopic ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal ...
openaire  

Spectroscopic infra red ellipsometry

open access: yes, 1989
Kroesen, G.M.W.   +4 more
openaire   +1 more source

Dynamic spectroscopic imaging ellipsometry

Optics Letters, 2022
A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch ...
Daesuk Kim   +6 more
openaire   +2 more sources

Roughness measurements by spectroscopic ellipsometry

Applied Optics, 1985
The surface roughnesses of fifteen well-characterized aluminum roughness standards were studied using spectroscopic ellipsometry in the spectral range from 300 to 650 nm at 70° angle of incidence. It was found that the measured ellipsometric parameters ψ and Δ qualitatively discriminated between the rms roughnesses of the specimens.
J R, Blanco, P J, McMarr, K, Vedam
openaire   +2 more sources

Data Analysis for Spectroscopic Ellipsometry

Thin Solid Films, 1993
Abstract The modeling of spectroscopic ellipsometry data is reviewed, and is divided into three phases. The first phase involves the calculation of the Fresnel reflection coefficients for a given layer structure; it is shown that the Abeles formalism provides the most flexibility, and can be readily related to the Berreman formalism for calculations ...
openaire   +1 more source

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