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Reality and Limits of Spectroscopic Ellipsometry
Optical Interference Coatings, 1988Ellipsometry is widely used for measurement of thin films. Usually instruments can only give index of refraction and thickness of one transparent layer at one wavelength. In order to know more about the layer two techniques have been developed recently; one is exploration of the spectral information covering the useful range from .23 up to 1.7μm.
J.L. Stehle, F. Bernoux, O. Thomas
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Spectroscopic Ellipsometry of Surface Plasmons
2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2019When plasmons are excited on metal surfaces, the electron system of the investigated sample is perturbed initiating changes in the dielectric function. Revealing these changes are crucial to design plasmonic components for ultrafast nanooptical switches, sensors or plasmonic circuits.
J. Budai, Z. Papa, J. Csontos, P. Dombi
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Advances in multichannel spectroscopic ellipsometry
Thin Solid Films, 1998Abstract Since the development and perfection of automatic ellipsometers, an effort that began nearly three decades ago, spectroscopic ellipsometry (SE) has increased in popularity as a non-destructive tool for characterizing the optical properties and layered structure of bulk solids and thin films.
R.W Collins +6 more
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Spectroscopic ellipsometry and thermoreflectance of GaAs
Journal of Applied Physics, 1995Spectroscopic-ellipsometry (SE) and thermoreflectance (TR) spectra of GaAs are presented. Measurements are carried out on the same bulk sample in the 1.2–5.6 eV photon-energy range at room temperature. These spectra are analyzed based on a simplified model of the interband transitions.
Shunji Ozaki, Sadao Adachi
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A Surface Scientist’s View on Spectroscopic Ellipsometry
2013Nowadays, a broad choice of instruments, including dedicated synchrotron radiation beamlines, allows to exploit Spectroscopic Ellipsometry (SE) to investigate the thickness and the dielectric properties of thin films, from the terahertz down to the VUV wavelength range.
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Industrial applications of spectroscopic ellipsometry
Thin Solid Films, 2004Abstract In this work we develop the concept of the ‘typical’ industrial ellipsometry user, discussing his/her needs and skills, compared to the scholarly user. Following this, we will give examples of industrial problems where spectroscopic ellipsometry (SE) was used to obtain the end result.
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Spectroscopic ellipsometry in the infrared range
Thin Solid Films, 1998Abstract Various recent applications of infrared ellipsometry (IR-SE) are reviewed with a particular emphasis on in situ studies. It is shown from the characterisation of hydrogen terminated c-Si surfaces that IR-SE can achieve submonolayer sensitivity. As compared to UV-visible SE, the IR range provides vibrational sensitivity.
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