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Spectroscopic ellipsometry: a historical overview
Thin Solid Films, 1998Abstract The historical development of spectroscopic ellipsometry (SE) from the very early stages to the present will be briefly reviewed. It is shown that SE is a truly powerful technique of great interest and use to physicists, chemists, electrochemists, electrical and chemical engineers, etc., as will be evident from the following few of the many ...
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Spectroscopic Ellipsometry on Metallic Gratings
2013During the last decades light was successfully modelled by micro and nano structures such as photonic crystals, gratings, wave couplers, and, in past years, also negative index materials. For the visible range a further miniaturization of the feature sizes of these metamaterials is necessary.
Michael Bergmair +2 more
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Spectroscopic ellipsometry in the infrared
Infrared Physics, 1981Abstract Infrared ellipsometry becomes simple and practicable by the combination of a photometric ellipsometer and a Fourier spectrometer. The different modes are described and the signal to noise ratio is calculated. Preliminary results for the optical constants of glass (BK7), fused quartz (SiO 2 ) and silicon are given in the range 400 −1 .
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