Results 11 to 20 of about 91,818,548 (263)
SU-8 Guiding Layer for Love Wave Devices [PDF]
Sensors, 2007 SU-8 is a technologically important photoresist used extensively for thefabrication of microfluidics and MEMS, allowing high aspect ratio structures to beproduced. In this work we report the use of SU-8 as a Love wave sensor guiding layerwhich allows the
Michael I. Newton +4 more
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In situ SU-8 silver nanocomposites. [PDF]
Beilstein J Nanotechnol, 2015 Nanocomposite materials containing metal nanoparticles are of considerable interest in photonics and optoelectronics applications. However, device fabrication of such materials always encounters the challenge of incorporation of preformed nanoparticles ...
Fischer SV, Uthuppu B, Jakobsen MH.
europepmc +6 more sources
Innovative SU-8 Lithography Techniques and Their Applications [PDF]
Micromachines, 2014 SU-8 has been widely used in a variety of applications for creating structures in micro-scale as well as sub-micron scales for more than 15 years. One of the most common structures made of SU-8 is tall (up to millimeters) high-aspect-ratio (up to 100:1 ...
Jeong Bong Lee +2 more
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SU-8 Based Waveguide for Optrodes [PDF]
Proceedings, 2018 Neural probes can be equipped with light for optogenetics applications. Different approaches are used for delivering light to the tissue: an optical fiber coupled to the probe, a µLED or a waveguide integrated on the probe.
Sara Pimenta +7 more
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Micromechanical testing of SU‐8 cantilevers [PDF]
Fatigue & Fracture of Engineering Materials & Structures, 2005 ABSTRACTSU‐8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU‐8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection
Hopcroft, M +6 more
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Bending characteristics of SU-8
Micro & Nano Letters, 2007 This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing ...
J.P.F. Spratley, M.C.L. Ward, P.S. Hall
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Volume Hologram Formation in SU-8 Photoresist. [PDF]
Polymers (Basel), 2017 In order to further understand the mechanism of volume hologram formation in photosensitive polymers, light-induced material response is analyzed in commonly used epoxy-based negative photoresist Epon SU-8. For this purpose, time-resolved investigation of volume holographic grating growth is performed in the SU-8 based host–guest system and in the pure
Sabel T.
europepmc +7 more sources
SU-8 based piezoresistive mechanical sensor [PDF]
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2003 We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that
J. Thaysen +6 more
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MRS Proceedings, 1998 AbstractAn existing test system for recording the stress-strain curves of metal microspecimens has been used to measure the strength of the ultrathick photoresist SU-8. The microspecimens are 3 mm long with a gage section 0.2 mm wide. The SU-8-25 specimens were 0.08 mm thick with an average strength of nearly 120 MPa, and the SU-8-50 specimens were 0 ...
A. Mcaleavey +3 more
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Sensors, 2008 Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple ...
Anja Boisen +8 more
doaj +2 more sources