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Uncrosslinked SU-8 as a sacrificial material
Journal of Micromechanics and Microengineering, 2004SU-8 has gained wide popularity as a surface micromachining material, mostly due to characteristics of the epoxy in the crosslinked state. However, uncrosslinked SU-8 also has interesting properties, particularly as a planar sacrificial layer in surface micromachined processes.
Charles Chung, Mark Allen
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Microphotonic systems utilizing SU-8
SPIE Proceedings, 2004SU-8 is a negative-tone photoresist that can serve as a complete optical bench for micro-photonic systems. Functional optical devices and passive alignment structures can all be formed in the same material system with common processing steps. Many interrelated process parameters control the final geometry of structures formed in SU-8, but all can be ...
Rumpf, Raymond C., Johnson, Eric G.
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SU-8 inkjet patterning for microfabrication
Polymer, 2019Abstract Controlled SU-8 inkjet printing constitutes an attractive approach to realize electronic microstructures, MEMS, microfluidic devices or transducers. Indeed, inkjet printing is the most promising low-cost manufacturing process capable of depositing functional materials with high resolution, making this technique attractive for micrometric ...
Bernasconi R. +4 more
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2018
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