Results 171 to 180 of about 26,685 (293)

Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology

open access: diamond, 2018
Griselda Stephany Abarca-Jiménez   +5 more
openalex   +2 more sources

A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C [PDF]

open access: green, 2007
R. Hellin-Rico   +4 more
openalex   +1 more source

Micromachining of the Si Wafer Surface Using Femtoseocond Laser Pulses

open access: green, 2005
Jae-Gu Kim   +4 more
openalex   +1 more source

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