Results 191 to 200 of about 26,685 (293)

The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining

, 2017
E Yu Gusev, J Y Jityaeva, Al V Bykov
openalex   +1 more source

Prediction of release-etch times for surface-micromachined structures

, 2002
William P. Eaton, Robert Jarecki, James H. Smith   +2 more
openalex   +2 more sources

Reducing the normal acceleration sensitivity of surface transverse wave resonators using micromachined isolation systems

, 2002
J.R. Reid, Victor M. Bright, J.T. Stewart, John Kosinski   +3 more
openalex   +2 more sources

Morphology Evolution of DF2 (AISI-O1) Surface Micromachined by Pulsed Nd:YAG Laser

, 2020
Kelvii Wei Guo
openalex   +2 more sources

Mask-guided microbial jet machining for functionalized textured interface fabrication. [PDF]

Sci Rep
Ruan J, Wang X, Wang Y, Zou W.
europepmc   +1 more source

Surface Quality Assessment in Femtosecond Laser Micromachining of Glass under Different Ambient Media

openalex   +1 more source

Effects of Process Parameters on Pulsed Laser Micromachining for Glass-Based Microfluidic Devices. [PDF]

Materials (Basel)
Alayed M, Al Fayez N, Alfihed S, Alshamrani N, Alghannam F.   +4 more
europepmc   +1 more source

Electrostatic actuators fabricated by surface micromachining techniques [PDF]

, 1996
R. Legtenberg
openalex   +1 more source

Multi-Layer Workpieces and Multiple-Wire Electrochemical Micromachining with Horizontal Electrolyte Flushing. [PDF]

Micromachines (Basel)
Tang X, Zeng Y.
europepmc   +1 more source

Micro-Hotplate for Thermocatalytic Gas Sensor Fabricated by Ceramic Laser Micromachining. [PDF]

Micromachines (Basel)
Samotaev N, Zebrev G, Oblov K, Etrekova M, Dzhumaev P, Obraztsov I, Podlepetsky B.   +6 more
europepmc   +1 more source