Results 201 to 210 of about 26,685 (293)

Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices. [PDF]

Microsyst Nanoeng
Yu J, Li F, Sun H, Zhu Y, Shi Y, Wang R, Du L, Li Y, Wu M, Liu J.   +9 more
europepmc   +1 more source

Design of Surface micromachined Compliant MEMS [PDF]

, 2001
openaire   +1 more source

Editorial for the Special Issue on Fabrication, Characterization and Application of Organic/Inorganic Film Membranes and Advanced Materials (Volume II). [PDF]

Membranes (Basel)
Kalinina E.
europepmc   +1 more source

A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array. [PDF]

Microsyst Nanoeng
Wang F, Ouyang X, Hong L, Song X, Xu W.
europepmc   +1 more source

Polarized spectral emittance from periodic micromachined surfaces—III. Undoped silicon: The normal direction in shallow lamellar gratings

, 1991
T.K. Wang, J.N. Zemel
openalex   +1 more source

Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review. [PDF]

Biomolecules
Welburn L, Javadi AMM, Nguyen L, Desai S.   +3 more
europepmc   +1 more source

Performance enhancement of electrochemical discharge micromachining of borosilicate glass using nitrogen gas assistance. [PDF]

Sci Rep
Tamilperuvalathan S, Varadharaju V, Rajamohan S, Balasubramanian D, Kale U, Kilikevičius A.   +5 more
europepmc   +1 more source

Sustainable Micromachining of Additively Manufactured Nickel Alloy: Effect of Biodegradable MQL on Tool Wear and Surface Quality [PDF]

Raman Kumar, K. Prakash, Vikasdeep Singh Mann, A. C. Umamaheshwer Rao, Ashutosh Pattanaik, Manoj Kumar Ojha, Ashwin Jacob, Hrushikesh Sarangi, Lema Abate   +8 more
openalex   +1 more source

FEM-Based Design and Micromachining of a Ratchet Click Mechanism in Mechanical Watch Movements. [PDF]

Micromachines (Basel)
Metelli A, Soardi G, Abeni A, Attanasio A.   +3 more
europepmc   +1 more source

2.5-Dimensional Structure Approach for Miniaturizing Flapping-Wing Air Vehicles. [PDF]

Micromachines (Basel)
Ishihara D, Kimura M, Suetsugu R, Ueo J, Ohira N, Takagi M, Ishiba K, Shirakawa N, Nishinohara R, Kimura M.   +9 more
europepmc   +1 more source