Surface Micromachined Flexural Plate Wave Device Integrable on Silicon
, 1999 Paul G. Clem +8 more
openalex +2 more sources
Fabrication of a Superhydrophobic Surface via Wet Etching of a Polydimethylsiloxane Micropillar Array. [PDF]
Polymers (Basel)Pei WH, Hung CC, Juang YJ.
europepmc +1 more source
Surface Micromachine Microfluidics: Design, Fabrication, Packaging, and Characterization
, 1999 Paul C. Galambos +6 more
openalex +2 more sources
Heteroepitaxial 3C-SiC for MEMS Applications. [PDF]
Micromachines (Basel)Garofalo A +6 more
europepmc +1 more source
Development of Phase-retrieval measuring System for 3D Micromachined Surface Profile Measurement
, 2002 Yasuhiro Takaya +3 more
openalex +1 more source
High-Quality Manufacturing with Electrochemical Jet Machining (ECJM) for Processing Applications: A Comprehensive Review, Challenges, and Future Opportunities. [PDF]
Micromachines (Basel)Huang Y +5 more
europepmc +1 more source
Self-Aligned Polysilicon MEMS-Reduced mask Count Surface Micromachining
, 1998 J.M. Noworolski, S.R. Sanders
openalex +1 more source
Integrated CAD/CAM Approach for Parametric Design and High Precision Fabrication of Planar Curvilinear Structures. [PDF]
Micromachines (Basel)Churchill-Baird JT +2 more
europepmc +1 more source
Robust minimally-invasive microfabricated stainless steel neural interfaces for high resolution recording. [PDF]
Nat CommunAhmed Z +5 more
europepmc +1 more source
5-Level Polysilicon Surface Micromachine Technology: Application to Complex Mechanical Systems
, 1998 M.S. Rodgers, J.J. Sniegowski
openalex +1 more source