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Catalytic Cleaning of Aluminum-Based Ceramic for Low-Noise Electronics. [PDF]
Karuppannan SK +3 more
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Etching: The Art of Semiconductor Micromachining. [PDF]
Romano L.
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A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]
Deb A +5 more
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A Comprehensive Research Dissemination Model for Polymer-Based Neural Interfaces. [PDF]
Scholten K +11 more
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Read my LIPSS: organic lasers on micromachined resonators. [PDF]
Dong T +8 more
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Demonstration of femtosecond laser induced refractive index change in silk-fibroin hydrogels. [PDF]
Islam QR +3 more
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Laser Fabrication and Comparative Study of Planoconcave and Planoconvex Microlenses on Fused Silica and Sapphire. [PDF]
Gottumukkala NR, Barnes C, Gupta MC.
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Surface micromachining for microelectromechanical systems
Proceedings of the IEEE, 1998Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed ...
R T Howe, R S Müller
exaly +2 more sources
Surface micromachined accelerometers
IEEE Journal of Solid-State Circuits, 1996Surface micromachining has enabled the cofabrication of thin-film micromechanical structures and CMOS or bipolar/MOS integrated circuits. Using linear, single-axis accelerometers as a motivating example, this paper discusses the fundamental mechanical as well as the electronic noise floors for representative capacitive position-sensing interface ...
Bernhard E. Boser, Roger T. Howe
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