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A Comprehensive Research Dissemination Model for Polymer-Based Neural Interfaces. [PDF]

open access: yesIEEE Trans Biomed Eng
Scholten K   +11 more
europepmc   +1 more source

Read my LIPSS: organic lasers on micromachined resonators. [PDF]

open access: yesNat Commun
Dong T   +8 more
europepmc   +1 more source
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Surface micromachining for microelectromechanical systems

Proceedings of the IEEE, 1998
Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed ...
R T Howe, R S Müller
exaly   +2 more sources

Surface micromachined accelerometers

IEEE Journal of Solid-State Circuits, 1996
Surface micromachining has enabled the cofabrication of thin-film micromechanical structures and CMOS or bipolar/MOS integrated circuits. Using linear, single-axis accelerometers as a motivating example, this paper discusses the fundamental mechanical as well as the electronic noise floors for representative capacitive position-sensing interface ...
Bernhard E. Boser, Roger T. Howe
openaire   +2 more sources

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