Results 241 to 250 of about 26,685 (293)
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2010
Surface Micromachining is called so because instead of crystal silicon substrate as functioning material this new technology uses thin film layers deposited on the substrate surface as functioning material. This chapter explains the different types of surface micromachining processes.
Leinenbach, Christina +2 more
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Surface Micromachining is called so because instead of crystal silicon substrate as functioning material this new technology uses thin film layers deposited on the substrate surface as functioning material. This chapter explains the different types of surface micromachining processes.
Leinenbach, Christina +2 more
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A Surface-Micromachined Levitating MEMS Speaker
2022 20th IEEE Interregional NEWCAS Conference (NEWCAS), 2022This paper presents the design and simulation of a levitating MEMS speaker. The device is composed of a levitating membrane actuated through electrostatic forces using several electrodes and a control system. The absence of supporting anchors allows for a drastic reduction of damping losses and therefore promises higher power efficiency.
Antoine Verreault +2 more
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Surface micromachined turbines
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002This paper reports the fabrication of three-dimensional microturbines, free from post-processing assembly, using surface micromachining technology. The fabrication process consists primarily of surface micromachining technology, with a bulk micromachining step to create the turbine flow channel normal to the wafer surface.
null Chia-Lun Tsai, A.K. Henning
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MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science, 2002
This paper describes a one-mask surface micromachining process in which nickel is used as a structural material and polysilicon as a sacrificial layer. High-aspect-ratio photolithography, up to 20 /spl mu/m thickness, is used for making a plating mold. Electroless plating on polysilicon is used for nickel deposition.
S. Furukawa +3 more
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This paper describes a one-mask surface micromachining process in which nickel is used as a structural material and polysilicon as a sacrificial layer. High-aspect-ratio photolithography, up to 20 /spl mu/m thickness, is used for making a plating mold. Electroless plating on polysilicon is used for nickel deposition.
S. Furukawa +3 more
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Surface micromachined microengine
Sensors and Actuators A: Physical, 1995Abstract The design, fabrication, and preliminary testing of a polysilicon microengine are presented. In this early work, electrostatic comb-drive actuation is used to demonstrate the microengine. However, the basic gear/link element of the microengine can be driven by any suitably forceful linear actuators.
Ernest J. Garcia, Jeffry J. Sniegowski
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Surface-micromachined microoptical elements and systems
Proceedings of the IEEE, 1998Optical systems are ubiquitous in the present-day societal fabric, from sophisticated fiber-optic telecommunication infrastructure to visual information display, down to mundane chores such as bar-code reading at the supermarket. Most of these existing systems are built from bulk optical components, as they have been for many years.
Richard S. Muller, Kam Y. Lau
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Particulate failures for surface-micromachined MEMS
International Test Conference 1999. Proceedings (IEEE Cat. No.99CH37034), 2003We investigate the failure modes of a comb-drive surface-micromachined microresonator that are caused by particulate contaminations. The microresonator structure is chosen as our research vehicle because it possesses all the primitive components found in many capacitive-based MEMS sensors and actuators.
Tao Jiang 0028, Ronald D. Blanton
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A surface micromachined microtactile sensor array
Proceedings of IEEE International Conference on Robotics and Automation, 2002This paper discusses the design and testing of an eight-by-eight tactile capacitive array sensor for detection of sub-millimeter features and objects, where the entire sensor array is smaller than normal human spatial resolution of 1 mm. Each square taction is less than 100 /spl mu/m on a side, with similar spacing between elements.
Bonnie L. Gray, Ronald S. Fearing
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Surface micromachined diamond microswitch
Diamond and Related Materials, 2000Abstract The realization of an electrostatically actuated all-diamond microswitch is presented. Diamond's mechanical properties are superior to those of most of the common MEMS materials combined with the widest range of electrical conductivity offering the possibility for stacks of insulating and conductive layers of essentially identical thermal ...
S. Ertl +5 more
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Surface micromachined metallic microneedles
Journal of Microelectromechanical Systems, 2003In this paper, a method for fabricating surface micromachined, hollow, metallic microneedles is described. Single microneedle and multiple microneedle arrays with process enabled features such as complex tip geometries, micro barbs, mechanical penetration stops and multiple fluid output ports were fabricated, packaged and characterized.
S. Chandrasekaran +2 more
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