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Strength of Surface Micromachined Diaphragms
MRS Proceedings, 1998AbstractThis paper presents the study of the strength of surface micromachined diaphragms. It is found that the diaphragm strength strongly depends on the diaphragm boundary conditions. A new fabrication technique which does not change the mask and fabrication process is proposed to improve the common step-up boundary condition.
Xing Yang, Frances M. Siu, Yu-Chong Tai
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Surface micromachining materials
IEE Colloquium on Microengineering Technologies and How to Exploit Them, 1997Surface micromachining is an attractive micro technology since it exploits very closely the materials, process technology and manufacturing methodology developed for the semiconductor industry. Three dimension structures are created through sequential deposition, patterning and selective removal of layers deposited onto the surface of a silicon wafer ...
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A surface-micromachined tunable microgyroscope
Proceedings 1996 IEEE Conference on Emerging Technologies and Factory Automation. ETFA '96, 2002We present a surface-micromachined microgyroscope, whose resonant frequency is electrostatically-tunable after fabrication. The microgyroscope has two oscillation modes: a sensing mode and a actuating mode. In a theoretical study, the microgyroscope has been designed so that the resonant frequency in the sensing mode is higher than that in the ...
null Ki Bang Lee +5 more
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Surface Micromachining: A Brief Introduction
MRS Bulletin, 2001The rapid expansion of microelectromechanical systems (MEMS) into new application areas is due in large part to the development of surface-micromachining techniques that allow the fabrication of a wide variety of MEMS devices with structural components that can execute motion in at least one direction.
Mehran Mehregany, Christian A. Zorman
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Surface Micromachined PDMS Microchannels
ASME 5th International Conference on Nanochannels, Microchannels, and Minichannels, 2007A new surface micromachining technique for Poly dimethylsiloxane (PDMS) microchannels has been developed to address the leakage problem affecting traditional PDMS microchannel process with embedded tall structures or sudden topographical transitions. Bulk micromachined PDMS cannot be conformally bonded with the surfaces having tall topological features
Balasubramanian Ganapathy Subramani +1 more
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2003
Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by ...
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Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by ...
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Surface Micromachined Acceleration Sensors
2020Micromechatronic sensors have many applications in measuring linear acceleration along one or several axes. For example, accelerometers are widely applied in cars for detecting crashes and for triggering the release of airbags. In mobile devices, they switch the display between landscape and portrait format.
Stephanus Büttgenbach +3 more
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Micromachined superhydrophobic surfaces
2014Superhydrophobic surfaces have attracted a lot of attention since the potential applications of self-cleaning effect in self-cleaning textiles, fluid transport in micro/nanofluidics, bio-MEMS and so on. Different techniques have been developed to fabricate superhydrophobic surfaces with roughness in micro or nano scale.
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Surface micromachined deformable mirrors
Proceedings 1996 IEEE Conference on Emerging Technologies and Factory Automation. ETFA '96, 2002At Boston University, we have begun a project on surface-machined microactuators coordinated to achieve precision actuation and control of deformable mirrors for modulation of optical wavefronts. The mirror is supported on a massively parallel system of electrostatically-controlled, interconnected microactuators that can be coordinated to achieve ...
T.G. Bifano, R. Krishnamoorthy
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Surface micromachined scanning mirrors
Microelectronic Engineering, 1992Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 k-Hz - 632 kHz for cantilever beams with Q values between 5 and 11.
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