Results 261 to 270 of about 26,685 (293)

PSG layers for surface micromachining

Sensors and Actuators A: Physical, 1994
Abstract The effect of both the deposition parameters and subsequent thermal processing upon LPCVD phosphosilicate glass (PSG) is experimentally investigated with an emphasis on establishing the effect of phosphorus content and PSG processing on the essential characteristics of PSG, such as etch rate, shrinkage, etch rate reduction and distribution ...
D. Poenar, P.J. French, R. Mallée, P.M. Sarro, R.F. Wolffenbuttel   +4 more
openaire   +1 more source

Photothermal surface-micromachined actuators

IEEE Transactions on Electron Devices, 2003
We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 /spl mu/m of displacement. The polysilicon actuators are homogenous and electrically isolated.
A.D. Oliver, S.R. Vigil, Y.B. Gianchandani   +2 more
openaire   +1 more source

Laser Micromachining for Polymer Surface Topography Design

Journal of Visualized Experiments
Soft magnetoactive elastomers (MAEs) are smart materials that respond to external magnetic fields by dynamically altering their mechanical properties. They are composed of magnetically responsive microparticles embedded within a soft polymer matrix, exhibiting an effective shear modulus of up to 100 kPa.
Straus, Izidor, Kravanja, Gaia, Hribar, Luka, , strojnik, Kriegl, Raphael, Shamonin, Mikhail, Drevenšek Olenik, Irena, Jezeršek, Matija, Kokot, Gašper, fizik   +7 more
openaire   +3 more sources

Surface micromachining

Journal of Micromechanics and Microengineering, 1992
C Linder, L Paratte, M -A Gretillat, V P Jaecklin, N F de Rooij   +4 more
openaire   +1 more source

Surface micromachining for microsensors and microactuators

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1988
Micromechanical structures can be made by selectively etching sacrificial layers from a multilayer sandwich of patterned thin films. This paper reviews this technology, termed surface micromachining, with an emphasis on polysilicon microstructures. Micromechanical characteristics of thin-film microstructures critically depend on the average residual ...
openaire   +1 more source

Surface micromachined ultrasonic transducer

The Journal of the Acoustical Society of America, 2002
A spacer layer ( 7 ) with a cavity ( 8 ) etched out therein and a diaphragm ( 2 ) arranged thereabove on the spacer layer are located on a silicon substrate ( 1 ) with a doped region ( 5 ) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts ( 4, 6 ) to electronic components ( 13 ) that are ...
openaire   +1 more source

Surface micromachined pressure transducers

Sensors and Actuators A: Physical, 1991
Abstract Typical IC processing is fundamentally two dimensional; sensors are three-dimensional structures. In surface micromachining, two-dimensional IC processing is extended to sensor structures by the addition of one or more sacrificial layers which are removed by lateral etching.
openaire   +1 more source

Effects of acid treatment and plasma micromachining on the surface properties of carbon fibers

Applied Surface Science, 2022
Paul K Chu
exaly  

Roughness characterization and formation mechanism of abrasive air jet micromachining surface studied by power spectral density

Journal of Manufacturing Processes, 2020
Quanlai Li, Yafeng Deng, Wentian Shi
exaly  

Water-Soluble Sacrificial Layers for Surface Micromachining

Small, 2005
Vincent Linder, Byron D Gates, Declan Ryan   +2 more
exaly