Results 271 to 280 of about 26,685 (293)
Some of the next articles are maybe not open access.

An Introduction to Surface-Micromachining

2004
Robert W. Johnstone, M. Parameswaran
openaire   +1 more source

Direct-write laser micromachining and universal surface modification of PMMA for device development

Sensors and Actuators B: Chemical, 2004
Ji-Yen Cheng, Tai-Horng Young
exaly  

Surface-Micromachined Mechanisms

2001
Andrew Oliver, David Plummer
openaire   +1 more source

Investigation of electrodischarge micromachining controllable factors on machined silicon surface quality

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2001
S H Yeo
exaly  

An accelerometer made in a two-layer surface-micromachining technology

Sensors and Actuators A: Physical, 1996
E Obermeier
exaly  

New FET accelerometer based on surface micromachining

Sensors and Actuators A: Physical, 1997
J A Plaza, J Esteve
exaly  

Home - About - Disclaimer - Privacy