Results 271 to 280 of about 26,685 (293)
Some of the next articles are maybe not open access.
An Introduction to Surface-Micromachining
2004Robert W. Johnstone, M. Parameswaran
openaire +1 more source
Direct-write laser micromachining and universal surface modification of PMMA for device development
Sensors and Actuators B: Chemical, 2004Ji-Yen Cheng, Tai-Horng Young
exaly
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 2001
S H Yeo
exaly
S H Yeo
exaly
An accelerometer made in a two-layer surface-micromachining technology
Sensors and Actuators A: Physical, 1996E Obermeier
exaly
New FET accelerometer based on surface micromachining
Sensors and Actuators A: Physical, 1997J A Plaza, J Esteve
exaly

