Results 281 to 290 of about 26,685 (293)
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Diamond surface micromachining technology
Diamond and Related Materials, 1999Congxin Ren, Weiyuan Wang
exaly
RF-MEMS BAW Filter Using Surface Micromachining
Integrated Ferroelectrics, 2002Tian-Ling Ren +2 more
exaly
Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining
Sensors and Actuators A: Physical, 2002G Wachutka
exaly
Out-of-plane refractive microlens fabricated by surface micromachining
IEEE Photonics Technology Letters, 1996L Y Lin, Ming C Wu
exaly
Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors
Ultramicroscopy, 2005Yong-Sang Kim
exaly

