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A TCAD system for VLSI implementation of the CVD process using VHDL
The Integration VLSI Journal, 2004Georgios Sirakoulis
exaly
TCAD Accomplishments And Challenges In VLSI
Proceedings of Technical Papers. International Symposium on VLSI Technology, Systems, and Applications, 2005openaire +1 more source
Session 05-B TCAD: Applications I
2010 International Conference on Simulation of Semiconductor Processes and Devices, 2010openaire +1 more source