Fabrication of recessed-gate AlGaN/GaN MOSFETs using TMAH wet etching with Cu ion implantation
Results in PhysicsIn this study, recessed-gate AlGaN/GaN MOSFETs were fabricated using a novel recess etching method––TMAH wet etching with Cu ion implantation. This innovative approach injects Cu ions selectively into the target AlGaN layer, creating defects that are ...
Jun Hyeok Heo +5 more
doaj +2 more sources
New applications of silicon wet etching using tmah water solution for fabrication of mems sensors. [PDF]
, 2013 U ovom radu prikazani su razvoj i usavršavanje tehnološkog procesa vlažnoganizotropnog hemijskog nagrizanja silicijuma orijentacije (100) u vodenom rastvorutetrametil-amonijum hidroksida (TMAH) koncentracije 25 tež.
Smiljanić, Milče
core +11 more sources
Low leakage and high blocking voltage GaN-on-GaN Schottky diode by TMAH surface treatment
Power Electronic Devices and ComponentsIn this study, the impact of surface treatment by TMAH and HF on the electrical characteristics of GaN-on-GaN Schottky diodes is examined through I–V and C–V characterizations.
Vishwajeet Maurya +10 more
doaj +2 more sources
Molecular-Level Pore Engineering for Precise Separation via Active Solvent-Mediated Interfacial Polymerization. [PDF]
Adv Sci (Weinh)We demonstrate that microemulsion solvents can actively template molecular‐level pores within selective layer during interfacial polymerization. By creating localized quasi‐homogeneous polymerization zones, the membrane achieved a 7.1‐fold enhancement in water permeance with increased selectivity.
Li F +4 more
europepmc +2 more sources
Mapping gaseous dimethylamine, trimethylamine, ammonia, and their particulate counterparts in marine atmospheres of China’s marginal seas – Part 2: Spatiotemporal heterogeneity, causes, and hypothesis [PDF]
Atmospheric Chemistry and Physics, 2022 Spatiotemporal heterogeneities in the concentrations of alkaline gases and their particulate counterparts in the marine atmosphere over China's marginal seas were investigated in terms of causes and chemical conversion during two winter cruise campaigns,
Y. Gao +8 more
doaj +2 more sources
Insights Into the Influence of Sidewall Morphology on the Light Extraction Efficiency of Mini-LEDs
IEEE Photonics Journal, 2019 We systemically investigated the influence of sidewall morphology change based on TMAH etching on the optical performance of mini-LEDs. The dominant feature of prism structures on the sidewall of mini-LEDs with TMAH etching treatment varied from ...
Bin Tang +5 more
doaj +1 more source
Effects of curing condition and particle size of aggregate on the expansion and microstructure of dolomitic aggregates cured in TMAH solution [PDF]
Royal Society Open Science, 2019 In this paper, the modified microbars prepared by dolomitic aggregates with three kinds of particle size and self-made cement without K+ and Na+ were cured in 1 and 2 N tetramethyl ammonium hydroxide (TMAH) solution at 20°C, 60°C and 80°C, respectively ...
Bin Yang, Xiaoxiao Chen, Min Deng
doaj +1 more source
Applied Sciences, 2019 Nitrogen-containing wastewater is an important issue in optoelectronic and semiconductor industries. Wastewater containing nitrogen compounds such as ammonium, monoethanolamine (MEA), and tetramethylammonium hydroxide (TMAH) must be properly treated due ...
Da Tian Chang +3 more
doaj +1 more source
Nanomaterials, 2019 We demonstrated that the tetramethylammonium hydroxide (TMAH) solution possesses different etching abilities to the chip sidewalls with different orientations because the orientation of chip sidewall determines the exposed crystallographic plane of ...
Hui Wan +5 more
doaj +1 more source
IEEE Journal of the Electron Devices Society, 2018 We demonstrated dual-surface modification of GaN/AlGaN/GaN high-electron mobility transistors using tetramethylammonium hydroxide (TMAH) and piranha solutions prior to gate metallization.
M. Siva Pratap Reddy +3 more
doaj +1 more source