Vertical Etching of Scandium Aluminum Nitride Thin Films Using TMAH Solution [PDF]
Nanomaterials, 2023 A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are some of the outstanding properties that have made ScxAl1−xN a promising material in numerous MEMS and optoelectronics applications.
A. S. M. Zadid Shifat +6 more
doaj +4 more sources
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH [PDF]
Sensors, 2009 A novel method has been developed to fabricate submicron beams with galvanic etch stop for Si in TMAH. The different Au:Si area ratios before and after the release of the beams are used to trigger the galvanic etch stop to fabricate submicron single ...
Yuelin Wang +5 more
doaj +3 more sources
InGaN Laser Diodes with Etched Facets for Photonic Integrated Circuit Applications [PDF]
Micromachines, 2023 The main objective of this work is to demonstrate and validate the feasibility of fabricating (Al, In) GaN laser diodes with etched facets. The facets are fabricated using a two-step dry and wet etching process: inductively coupled plasma—reactive ion ...
Krzysztof Gibasiewicz +6 more
doaj +2 more sources
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching [PDF]
Frontiers in Materials, 2016 We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process.
Kapil Debnath +7 more
doaj +3 more sources
Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology [PDF]
MicromachinesThis paper presents a novel silicon-based piezoresistive pressure sensor composed of a silicon layer with sensing elements and a glass cover for hermetic packaging.
Fengchao Li +9 more
doaj +2 more sources
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer [PDF]
MicromachinesPiezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability.
Yunhao Wang +4 more
doaj +2 more sources
Silicon anisotropic etching in KOH and TMAH with modified surface tension
Procedia Chemistry, 2009 AbstractEtching rates and morphologies of Si wafers with different crystallographic orientations etched in pure TMAH and TMAH with isopropyl alcohol have been analysed. IPA addition caused significant improvement in the morphology of some etched surfaces. Similar effects had been already observed in KOH+IPA solutions.
Irena Zubel
exaly +2 more sources
Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors [PDF]
, 2011 A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate.
Driessen, A. +4 more
core +31 more sources
Energies, 2021 This paper proposes a new technique to engineer the Fin channel in vertical GaN FinFET toward a straight and smooth channel sidewall. Consequently, the GaN wet etching in the TMAH solution is detailed; we found that the m-GaN plane has lower surface ...
Nedal Al Taradeh +9 more
doaj +1 more source
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Micro and Nano Systems Letters, 2021 Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications in the field of microelectromechanical systems (MEMS).
Prem Pal +5 more
doaj +1 more source