Results 11 to 20 of about 3,921 (200)
Energies, 2021 TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage,
Valentina Innocenzi +3 more
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Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt.% TMAX [PDF]
Hemijska Industrija, 2021 In this paper, fabrication of silicon microchannels with integrated obstacles by using 25 wt.% tetramethylammonium hydroxide (TMAH) aqueous solution at the temperature of 80°C is presented and analysed.
Smiljanić Milče M. +7 more
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Recrystallized parylene as a mask for silicon chemical etching [PDF]
, 2008 This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours.
Kuo, Wen-Cheng +3 more
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Insights Into the Influence of Sidewall Morphology on the Light Extraction Efficiency of Mini-LEDs
IEEE Photonics Journal, 2019 We systemically investigated the influence of sidewall morphology change based on TMAH etching on the optical performance of mini-LEDs. The dominant feature of prism structures on the sidewall of mini-LEDs with TMAH etching treatment varied from ...
Bin Tang +5 more
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Nanomaterials, 2021 The tetramethylammonium hydroxide (TMAH)-controlled alkaline etching of nickel hexacyanoferrate (NiHCF) mesocrystals is explored. The alkaline etching enables the formation of hollow framework structures with an increased surface area, the exposure of ...
Sascha Keßler +3 more
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Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives [PDF]
, 1995 This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other ...
Hsieh, Wen H. +4 more
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Nanomaterials, 2019 We demonstrated that the tetramethylammonium hydroxide (TMAH) solution possesses different etching abilities to the chip sidewalls with different orientations because the orientation of chip sidewall determines the exposed crystallographic plane of ...
Hui Wan +5 more
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Effective suppression of interface states in recessed-gate MIS-HEMTs by TMAH wet etching
Applied Physics Express, 2023 The effect of tetramethylammonium hydroxide (TMAH) treatment prior to gate dielectric deposition on the performance of recessed-gate AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) was investigated.
Yu Li +11 more
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Ultra-thin silicon based piezoelectric capacitive tactile sensor [PDF]
, 2016 This paper presents an ultra-thin bendable silicon based tactile sensor, in a piezoelectric capacitor configuration, realized by wet anisotropic etching as post-processing steps.
Dahiya, Ravinder +4 more
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Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si [PDF]
Journal of the Serbian Chemical Society, 2007 The undercutting process of thermal SiO2 microcantilevers with different orientations on (100) Si wafer was studied. The silicon substrate was removed by anisotropic chemical etching with a 25 wt. % aqueous solution of TMAH or a 30 wt.
Jović Vesna +3 more
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