Results 41 to 50 of about 3,921 (200)
Nanometer lithography on silicon and hydrogenated amorphous silicon with low-energy electrons [PDF]
, 1995 We report the local oxidation of hydrogen terminated silicon (Si) surfaces induced with the scanning-tunneling microscope (STM) operating in air and by a beam of free low-energy electrons.
Birk, H. +4 more
core +4 more sources
A High Efficiency Lateral Light Emitting Device on SOI [PDF]
, 2004 The infrared light emission of lateral p/sup +/-p-n/sup +/ diodes realized on SIMOX-SOI (separation by implantation of oxygen - silicon on insulator) substrates has been studied.
Goossens, M.J. +5 more
core +3 more sources
Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
Micromachines, 2019 Squares and circles are basic patterns for most mask designs of silicon microdevices. Evolution of etched Si crystallographic planes defined by square and circle patterns in the masking layer is presented and analyzed in this paper.
Milče M. Smiljanić +4 more
doaj +1 more source
Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS [PDF]
, 2016 In wet bulk micromachining, the etching characteristics are orientation dependent. As a result, prolonged etching of mask openings of any geometric shape on both Si{100} and Si{110} wafers results in a structure defined by the slowest etching planes.
Pal, Prem +4 more
core +1 more source
Origin and Control of OFF-State Leakage Current in GaN-on-Si Vertical Diodes [PDF]
, 2015 Conventional GaN vertical devices, though promising for high-power applications, need expensive GaN substrates. Recently, low-cost GaN-on-Si vertical diodes have been demonstrated for the first time.
Azize, Mohamed +12 more
core +1 more source
Advanced Functional Materials, EarlyView.A MXene/PEDOT coating enables multimodal functionality and dual‐analyte detection of dopamine and serotonin in flexible microelectrode arrays while enhancing electrophysiological recording quality. The anti‐fouling, low‐impedance interface overcomes key limitations of conventional coatings, providing a robust and versatile platform to investigate the ...
Ilaria Gatti +8 more
wiley +1 more source
Synthesis and Property of Tellurium-Containing Polymer for Extreme Ultraviolet Resist Material [PDF]
, 2017 Synthesis, physical properties, and resist properties of tellurium containing polymer with pendant adamantyl ester groups poly(Re-co-Te)-AD were examined, relevant to the application of resist material for extreme ultraviolet laser photolithography (EUVL)
Fukunaga Mari +5 more
core +2 more sources
Advanced Materials, EarlyView.This study demonstrates a self‐assembly process to generate free‐standing piezoelectric nanomembranes, forming ultracompact microtubular acoustic wave sensors and actuators. The miniaturized 3D piezoelectric platform reported in this work can be applied in telecommunication, energy harvesting, and acoustofluidics. Moreover, the 3D self‐assembly can add
Raphaël C. L‐M. Doineau +9 more
wiley +1 more source
Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements [PDF]
, 2008 We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure.
de Ridder, R.M. +7 more
core +1 more source
Ultrasonic inspection and self-healing of Ge and 3C-SiC semiconductor membranes [PDF]
, 2020 Knowledge of the mechanical properties and stability of thin film structures is important for device operation. Potential failures related to crack initiation and growth must be identified early, to enable healing through e.g. annealing.
Colston, Gerard B. +6 more
core +1 more source