Results 61 to 70 of about 812 (165)

Spin Qubits Confined to a Silicon Nano-Ridge

Applied Sciences, 2019
Electrostatically-defined quantum dots (QDs) in silicon are an attractive platform for quantum computation. Localized single electron spins define qubits and provide excellent manipulation and read-out fidelities.
J. Klos, B. Sun, J. Beyer, S. Kindel, L. Hellmich, J. Knoch, L. R. Schreiber   +6 more
doaj   +1 more source

Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities

Micro and Nano Engineering
Silicon nanofabrication plays a crucial role in the development of advanced electronic, photonic, and quantum devices. Focused ion beam (FIB) milling is widely used for direct patterning at the nanoscale, but it requires high ion fluences, leading to ...
E. Scattolo, A. Cian, J. Llobet, X. Borrise Nogue, S. Mondal, M. Barozzi, A. Bagolini, M. Crivellari, F. Pérez-Murano, D. Giubertoni   +9 more
doaj   +1 more source

Fabrication of β-Ga2O3/air-gap structures on (010) β-Ga2O3 by wet etching in tetramethylammonium hydroxide (TMAH)

Applied Physics Express
We demonstrated the fabrication of β -Ga _2 O _3 /air-gap structures on (010) β -Ga _2 O _3 substrates through sequential dry etching and crystallographic wet etching.
Takayoshi Oshima
doaj   +1 more source

Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation

Microsystems & Nanoengineering
Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their ...
Jacopo Ruggeri, Udo Ausserlechner, Helmut Köck, Karen M. Dowling   +3 more
doaj   +1 more source

Non standard behaviour of TMAH anisotropic wet etching

, 1998
Trabajo presentado en Eurosensors XII: 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and Their Applications, celebrado en Southampton (Reino Unido), del 13 al 16 de septiembre de ...
Duch, M., Esteve i Tintó, Jaume, Acero Leal, María Cruz, Merlos Domingo, Ángel   +3 more
openaire   +1 more source

Wafer-Level Self-Assembly and Interface Passivation Patterning Technology for Nanomaterial-Compatible 3D MEMS Sensing Chips. [PDF]

Nanomicro Lett
Zhang Z, Zhang Y, Luo Y, Lv G, Yin J, Tan P, Duan G.   +6 more
europepmc   +1 more source

Suspended Germanium-on-Silicon Photonic Integrated Circuits Operating in the Long-Wave Infrared and Their Use for Ethanol Sensing. [PDF]

ACS Photonics
Lin PS, Hellström PE, Zervos C, Niklaus F, Gylfason KB.   +4 more
europepmc   +1 more source

Fabrication and dimensional scaling of SiNW-FET array via AFM-LAO lithography and self-limiting oxidation. [PDF]

Sci Rep
Alias NN, Mohammad Haniff MAS, Yaacob KA.   +2 more
europepmc   +1 more source

Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect. [PDF]

Micromachines (Basel)
Todi A, Mansoorzare H, Abdolvand R.
europepmc   +1 more source

Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging. [PDF]

Microsyst Nanoeng
Pan A, Zhu X, Zhu C, Yin J, Hasan MS, Liu Z, Ban D, Cui B.   +7 more
europepmc   +1 more source