Results 61 to 70 of about 103,452 (148)

Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging. [PDF]

Microsyst Nanoeng
Pan A, Zhu X, Zhu C, Yin J, Hasan MS, Liu Z, Ban D, Cui B.   +7 more
europepmc   +1 more source

Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices. [PDF]

Micromachines (Basel)
Patel R, Adhikari MS, Bansal D, Majumder T.   +3 more
europepmc   +1 more source

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography. [PDF]

Chem Sci
Chu TTH, Le DN, Lee M, Narayan DM, Kim DS, Shirodkar S, Choe M, Yoo S, Tiwale N, Choi R, Ahn J, Sung MM, Nam CY, Kim J.   +13 more
europepmc   +1 more source

Semiconductor manufacturing wastewater challenges and the potential solutions via printed electronics. [PDF]

iScience
Sandhu S, Zumeit A, Tian Z, Vinciguerra V, Dahiya R.   +4 more
europepmc   +1 more source

Development and characterization of a chemically amplified positive-tone hybrid resist for thick-film microfabrication. [PDF]

RSC Adv
Nasrallah N, Calas S, Etienne P.
europepmc   +1 more source

An Investigation into the Footing Profile Suppression in (110) Si Anisotropic Etching. [PDF]

Micromachines (Basel)
Wang Z, Xie G, Xu G, Li G, Zhou W, Fu D, Kong L, Chen Z, Liu S.   +8 more
europepmc   +1 more source

Evaluating an alternative Pt-W alloy as a low-n EUV mask absorber: Film properties and imaging performance. [PDF]

iScience
Li Z, Tang H, Wang X, Tian H, Wang Y, Hu H.   +5 more
europepmc   +1 more source

Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures. [PDF]

Sci Rep
Kim EK, Hong JW, Lim WS, Kim JY, Kim KL, Park JS, Park YJ, Kim CH, Eoh HJ, Jeong JW, Kim SH, Jeon YW, Kim DW, Yeom GY.   +13 more
europepmc   +1 more source

Design and fabrication of robust hybrid photonic crystal cavities. [PDF]

Nanophotonics
Abulnaga A, Karg S, Mukherjee S, Gupta A, Baldwin KW, Pfeiffer LN, de Leon NP.   +6 more
europepmc   +1 more source

Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability. [PDF]

Micromachines (Basel)
Qi Z, Gu J, Zhu B, Zhai Z, Bie X, Yang W, Zou X.   +6 more
europepmc   +1 more source