PFAS free chemically amplified resists enabled by low activation energy hydrocarbon cage monomers. [PDF]
Liu Y +12 more
europepmc +1 more source
Ultrafast Solid-State Electrochemical Imprinting Utilizing Polymer Electrolyte Membrane Stamps for Static/Dynamic Structural Coloration and Letter Encryption. [PDF]
Yamazaki K +3 more
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Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography. [PDF]
Cheng R +5 more
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Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer. [PDF]
Wang Y, Wu S, Wang W, Wu T, Li X.
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Calorimetric differential pressure sensor with high sensitivity for hydrodynamic perception. [PDF]
Cao Y +8 more
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Mechanisms of Film-Formation-Related Defects in EUV Photoresists for Sub-3 nm Nodes and Synergistic Materials-Process-Intelligence Co-Optimization. [PDF]
Wu J +12 more
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Design, Fabrication, and Characterization of Capacitive Micromachined Ultrasonic Transducers for Transcranial, Multifocus Neurostimulation. [PDF]
Ibn Minhaj T +5 more
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Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping. [PDF]
Jung Y, Lee D, Kim J.
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Directed Self-Assembly of an Acid-Responsive Block Copolymer for Hole-Shrink Process and Pattern Transfer. [PDF]
Zhan J +5 more
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1-nm-thick epitaxial AlN passivation for highly efficient flexible InGaN red micro-LEDs. [PDF]
Kong K +14 more
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