Wet etching of (−102) β-Ga2O3 with tetramethylammonium hydroxide (TMAH)
Science and Technology of Advanced MaterialsWe investigated wet etching of (−102) β-Ga2O3 substrates using heated 25 wt% tetramethylammonium hydroxide (TMAH). The (−102) plane exhibited an etching rate that was one order of magnitude higher than those of the widely used (100), (010), (001), and ...
Takayoshi Oshima
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Advanced Functional Materials, Volume 36, Issue 1, 2 January 2026.Epitaxial piezoelectric α‐quartz/Si BioNEMS sensors, made using soft chemistry, effectively detect the Chikungunya virus. They have a mass sensitivity of 205 pg Hz−1 in liquid and can detect the virus at a limit of 9 ng mL−1. This development enables high‐frequency mass devices for point‐of‐care testing in healthcare and other electronic applications ...
Raissa Rathar +12 more
wiley +1 more source
Surface Texturing with Hemispherical Cavities to Improve Efficiency in Silicon Solar Cells
International Journal of Photoenergy, 2012 Improvement of solar-cell efficiency at a minimum possible cost addition is constantly sought, and this is often achieved at incremental percentage steps.
D. W. de Lima Monteiro +3 more
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High quality single crystal Ge nano-membranes for opto-electronic integrated circuitry [PDF]
, 2015 Under the terms of the Creative Commons Attribution (CC BY) license to their work.-- et al.A thin, flat, and single crystal germanium membrane would be an ideal platform on which to mount sensors or integrate photonic and electronic devices, using ...
Alzina, Francesc +7 more
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Development of suspended thermoreflectance technique and its application in thermal property measurement of semiconductor materials [PDF]
Doctor of PhilosophyDepartment of Mechanical and Nuclear EngineeringGurpreet SinghThis dissertation details the development of a new scientific tool for the thermal characterization of freestanding micro/nano-scale materials, with specific application to
Sarkar, Dipta
core
Ultra-compact silicon nitride grating coupler for microscopy systems [PDF]
, 2017 Grating couplers have been widely used for coupling light between photonic chips and optical fibers. For various quantum-optics and bio-optics experiments, on the other hand, there is a need to achieve good light coupling between photonic chips and ...
Brainis, Edouard +7 more
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Spin Qubits Confined to a Silicon Nano-Ridge
Applied Sciences, 2019 Electrostatically-defined quantum dots (QDs) in silicon are an attractive platform for quantum computation. Localized single electron spins define qubits and provide excellent manipulation and read-out fidelities.
J. Klos +6 more
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A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators [PDF]
, 2006 A novel surface micromachining process is reported for aluminum nitride (AlN) thin films to fabricate piezoelectric unimorph suspension devices for micro actuator applications.
Berenschot, J.W. +3 more
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Fabrication of SiO2 by anisotropic etching of silicon [PDF]
, 2011 Bakalářská práce se zabývá přípravou membrán z oxidu křemičitého (SiO2) na křemíkovém (Si) substrátu pomocí anizotropního leptání křemíku. Masky pro anizotropní leptání křemíku byly vytvořeny pomocí elektronové litografie a chemického leptání SiO2.
Balajka, Jan
core
Fabrication of micro separation column for miniaturized gas chromatography system [PDF]
, 2018 The emphasis of this work is on the fabrication of a micro separation column for applicaton in miniaturized gas chromatography system. The micro column was made by microchannels fabricated on the silicon wafer and sealed with a glass lid.
P M, Greeshma, Singh, Shiv Govind
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