Results 101 to 110 of about 3,921 (200)

Non standard behaviour of TMAH anisotropic wet etching

, 1998
Trabajo presentado en Eurosensors XII: 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and Their Applications, celebrado en Southampton (Reino Unido), del 13 al 16 de septiembre de ...
Duch, M., Esteve i Tintó, Jaume, Acero Leal, María Cruz, Merlos Domingo, Ángel   +3 more
openaire   +1 more source

Wafer-Level Self-Assembly and Interface Passivation Patterning Technology for Nanomaterial-Compatible 3D MEMS Sensing Chips. [PDF]

Nanomicro Lett
Zhang Z, Zhang Y, Luo Y, Lv G, Yin J, Tan P, Duan G.   +6 more
europepmc   +1 more source

Fabrication and dimensional scaling of SiNW-FET array via AFM-LAO lithography and self-limiting oxidation. [PDF]

Sci Rep
Alias NN, Mohammad Haniff MAS, Yaacob KA.   +2 more
europepmc   +1 more source

Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging. [PDF]

Microsyst Nanoeng
Pan A, Zhu X, Zhu C, Yin J, Hasan MS, Liu Z, Ban D, Cui B.   +7 more
europepmc   +1 more source

Porous Silicon and Silicon Nanowires for On-Chip Supercapacitor Electrodes: A Review. [PDF]

Nanomaterials (Basel)
Sedlovets DM.
europepmc   +1 more source

Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices. [PDF]

Micromachines (Basel)
Patel R, Adhikari MS, Bansal D, Majumder T.   +3 more
europepmc   +1 more source

Stacked SiGe nanosheets p-FET for Sub-3 nm logic applications. [PDF]

Sci Rep, 2023
Chu CL, Hsu SH, Chang WY, Luo GL, Chen SH.   +4 more
europepmc   +1 more source

Semiconductor manufacturing wastewater challenges and the potential solutions via printed electronics. [PDF]

iScience
Sandhu S, Zumeit A, Tian Z, Vinciguerra V, Dahiya R.   +4 more
europepmc   +1 more source

Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures. [PDF]

Sci Rep
Kim EK, Hong JW, Lim WS, Kim JY, Kim KL, Park JS, Park YJ, Kim CH, Eoh HJ, Jeong JW, Kim SH, Jeon YW, Kim DW, Yeom GY.   +13 more
europepmc   +1 more source

CMOS-Compatible Fabrication Module for Sub-100 nm TiN and TaN Pillar Electrodes for Carbon Nanotube Test Structures. [PDF]

Nanomaterials (Basel)
Chen G, Fujii T, Yamada T, Hata K.
europepmc   +1 more source