Control of the Casimir force by the modification of dielectric properties with light
, 2007 The experimental demonstration of the modification of the Casimir force between a gold coated sphere and a single-crystal Si membrane by light pulses is performed.
E. M. Lifshitz +13 more
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Research on Si-based Ge micro-region structure and Ge lateral PIN photodetector [PDF]
, 2016 硅基光电探测器是硅基光电子技术重要的组成部分。近年来，锗（Ge）材料由于在近红外波段吸收系数高，空穴载流子迁移率大且能与硅基工艺兼容等特性在硅基探测器领域备受关注。为进一步提高光电特性，需要在Ge层中引入张应变，而张应变的引入可以通过微区结构来得到。基于硅基Ge外延材料，构造Ge微区结构的腐蚀过程一般只对Si材料的腐蚀速率有过研究，而对材料中存在的大量位错对结构制备影响的分析却并未开展。因此，研究腐蚀液中硅基Ge样品位错的影响，提高Ge微区结构应变，对提高Ge光电探测器性能有着重要的意义 ...
陈超文
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Room Temperature InP DFB Laser Array Directly Grown on (001) Silicon
, 2015 Fully exploiting the silicon photonics platform requires a fundamentally new approach to realize high-performance laser sources that can be integrated directly using wafer-scale fabrication methods.
Absil, Philippe +7 more
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Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities
Micro and Nano EngineeringSilicon nanofabrication plays a crucial role in the development of advanced electronic, photonic, and quantum devices. Focused ion beam (FIB) milling is widely used for direct patterning at the nanoscale, but it requires high ion fluences, leading to ...
E. Scattolo +9 more
doaj +1 more source
Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector [PDF]
, 2002 Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode ...
Berenschot, J.W. +4 more
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Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon
Bulletin of Materials Science, 1999 An investigation on the effect of TMAH concentration on the etch rate of silicon, and the influence of etchant concentration, ambient temperature and wafer thermal history on the formation of pyramids at the surface of TMAH etched silicon has been carried out.
Choi, W.K. +4 more
openaire +2 more sources
Applied Physics ExpressWe demonstrated the fabrication of β -Ga _2 O _3 /air-gap structures on (010) β -Ga _2 O _3 substrates through sequential dry etching and crystallographic wet etching.
Takayoshi Oshima
doaj +1 more source
Fabrication of nanostructures using wet chemical etching [PDF]
, 2014 Tato bakalářská práce se zabývá mokrým anizotropním leptáním křemíku a germania. Ukazuje dva možné přístupy tvorby anizotropních leptů a popisuje pomocné práce nutné k samotnému leptání.
Musálek, Tomáš
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Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation
Microsystems & NanoengineeringMicroelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their ...
Jacopo Ruggeri +3 more
doaj +1 more source
CMOS-compatible MEMS processes and their application to the development of biosensors
, 2012 The research activity developed during my Ph.D. program was focused on CMOS-compatible MEMS (Micro-Electro-Mechanical System) processes and their application to the development of biosensors.
RUSSINO, VINCENZO
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