Results 71 to 80 of about 812 (165)

Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices. [PDF]

Micromachines (Basel)
Patel R, Adhikari MS, Bansal D, Majumder T.   +3 more
europepmc   +1 more source

Porous Silicon and Silicon Nanowires for On-Chip Supercapacitor Electrodes: A Review. [PDF]

Nanomaterials (Basel)
Sedlovets DM.
europepmc   +1 more source

An Investigation into the Footing Profile Suppression in (110) Si Anisotropic Etching. [PDF]

Micromachines (Basel)
Wang Z, Xie G, Xu G, Li G, Zhou W, Fu D, Kong L, Chen Z, Liu S.   +8 more
europepmc   +1 more source

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography. [PDF]

Chem Sci
Chu TTH, Le DN, Lee M, Narayan DM, Kim DS, Shirodkar S, Choe M, Yoo S, Tiwale N, Choi R, Ahn J, Sung MM, Nam CY, Kim J.   +13 more
europepmc   +1 more source

Semiconductor manufacturing wastewater challenges and the potential solutions via printed electronics. [PDF]

iScience
Sandhu S, Zumeit A, Tian Z, Vinciguerra V, Dahiya R.   +4 more
europepmc   +1 more source

Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures. [PDF]

Sci Rep
Kim EK, Hong JW, Lim WS, Kim JY, Kim KL, Park JS, Park YJ, Kim CH, Eoh HJ, Jeong JW, Kim SH, Jeon YW, Kim DW, Yeom GY.   +13 more
europepmc   +1 more source

Design and fabrication of robust hybrid photonic crystal cavities. [PDF]

Nanophotonics
Abulnaga A, Karg S, Mukherjee S, Gupta A, Baldwin KW, Pfeiffer LN, de Leon NP.   +6 more
europepmc   +1 more source

CMOS-Compatible Fabrication Module for Sub-100 nm TiN and TaN Pillar Electrodes for Carbon Nanotube Test Structures. [PDF]

Nanomaterials (Basel)
Chen G, Fujii T, Yamada T, Hata K.
europepmc   +1 more source

Investigation of Current Effect of Suspended Graphene Pressure Sensor. [PDF]

Materials (Basel)
Mi H, Qi R, Li P, Su N, Wang J.
europepmc   +1 more source

Suppressing Gate-Induced Drain Leakage with an Asymmetric Gate Design in HiPco CNT FETs. [PDF]

Nanomaterials (Basel)
Ma H, Gu S, Zhai M, Liu H.
europepmc   +1 more source