Results 71 to 80 of about 3,921 (200)

High‐Temperature Operation of All‐Molecular Beam Epitaxy InAs/GaAs Quantum Dot Lasers on V‐Grooved Si (001)

physica status solidi (a), Volume 223, Issue 4, 24 February 2026.
We demonstrate thermally reliable all‐MBE InAs/GaAs quantum dot lasers directly grown on V‐grooved Si (001). By preventing V‐groove deformation and eliminating micro‐cracks, the device achieves a maximum pulsed operating temperature of 150°C. This establishes a robust, scalable platform for monolithic Si photonics.
Jun Li, Haotian Zeng, Lifeng Bao, Jae‐Seong Park, Chong Chen, Yangqian Wang, Hexing Wang, Kongming Liu, Yutong Zhang, Makhayeni Mtunzi, Huiwen Deng, Hui Jia, Frederic Gardes, Jeremy Moeyaert, Thierry Baron, Mingchu Tang, Alwyn Seeds, Huiyun Liu   +17 more
wiley   +1 more source

Enhancing Grayscale E‐Beam Lithography: Thermal Treatment of Novolak‐Based Resist for 3D Nanostructures

Advanced Materials Interfaces, Volume 13, Issue 4, 17 February 2026.
Surface roughness and chemistry of novolak‐based grayscale resists are dependent on both exposure dose and post‐exposure thermal treatment. The observed trends align with the viscoelastic phase separation model and underscore the need to consider both thermodynamic and kinetic factors in resist processing. By tailoring thermal treatment, it is possible
Rahul Singh, Christian Vinther Bertelsen, Neeti Kalyani, Maria Dimaki, Winnie Edith Svendsen   +4 more
wiley   +1 more source

High channel mobility at SiO2/GaN interface with different tilt angle trench sidewalls formed by wet etching treatment

APL Materials
The development of low-resistance Gallium nitride (GaN) trench metal-oxide semiconductor (MOS) channels is required. Since the trenches are formed by dry etching, their surfaces are inevitably exposed to plasma, leading to plasma-induced damage ...
Hirohisa Hirai, Yoshinao Miura, Akira Nakajima, Shinsuke Harada   +3 more
doaj   +1 more source

Synthesis and Property of Tannic Acid Derivatives and Their Application for Extreme Ultraviolet Laser Lithography System [PDF]

, 2018
We synthesized tannic acid derivatives with pendant cyclohexyl acetal moieties (TA-CVEn), butyl acetal moieties (TA-BVEn), and adamantyl ester moieties (TA-ADn) by the reaction of tannnic acid (TA) with cyclohexyl vinyl ether (CVE), butyl vinyl ether ...
Kozawa Takahiro, Kudo Hiroto, Ogawa Hiroki, Ohori Shizuya, Takeda Hiroya, Watanabe Takeo, Yamamoto Hiroki, 大堀 静也, 小川 大貴, 工藤 宏人, 竹田 紘也   +10 more
core   +2 more sources

Molecular Layer Deposited Aluminum‐Based Hybrid Resist for High‐Resolution Nanolithography and Direct Ultra‐High Aspect Ratio Pattern Transfer

Advanced Materials Technologies, Volume 11, Issue 3, 5 February 2026.
This study demonstrates an aluminum‐based hybrid photoresist synthesized via molecular layer deposition (MLD) using trimethylaluminum and hydroquinone. The resist achieves sub‐20 nm resolution and virtually infinite silicon etch selectivity, enabling 40 nm‐wide, micrometer‐tall nanostructures.
Won‐Il Lee, Dan N. Le, Matthew Yen, Melinda Lin, Ashwanth Subramanian, Xiao Tong, Nikhil Tiwale, Jiyoung Kim, Chang‐Yong Nam   +8 more
wiley   +1 more source

Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques

Sensors, 2011
A high Q-factor (quality-factor) spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process was investigated. The spiral inductor is manufactured on a silicon substrate.
Ming-Zhi Yang, Jin-Yu Hong, Ching-Liang Dai   +2 more
doaj   +1 more source

Kajian Mengenai Kebersandaran Pembentukan Keadaan Potong Bawah Penjuru Terhadap Jenis Larutan Pemunar dalam Penghasilan Diafram Beralun Silikon [PDF]

, 2006
Kertas kerja ini membentangkan hasil kajian simulasi mengenai kesan jenis larutan pemunar ke atas keadaan potong bawah penjuru yang terhasil pada struktur-struktur penjuru cembung diafram beralun silikon (l00).
Majlis, Burhanuddin Yeop, Soin, Nor Hayati   +1 more
core  

Tunable Patterned Blue Phase Liquid Crystals Based on Lithographic Process Technology

Advanced Optical Materials, Volume 14, Issue 6, 9 February 2026.
A patterned blue phase liquid crystal device with electrically driven, localized bistability is demonstrated using a cost‐efficient photolithographic dual‐alignment process. The device switches between a high‐contrast patterned state and a uniform reflective state.
Jia‐Yu Cao, Ting‐Mao Feng, Duan‐Yi Guo, Liang‐Ying Wu, Aleksandra Neumann, Kamil Orzechowski, Chun‐Ta Wang   +6 more
wiley   +1 more source

Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices

Nanomaterials, 2018
Heavily boron-doped silicon layers and boron etch-stop techniques have been widely used in the fabrication of microelectromechanical systems (MEMS).
Zhe Ma, Yang Liu, Lingxiao Deng, Mingliang Zhang, Shuyuan Zhang, Jing Ma, Peishuai Song, Qing Liu, An Ji, Fuhua Yang, Xiaodong Wang   +10 more
doaj   +1 more source

Field Emission Control via Work Function Modulation in Semimetallic Graphene Edge Cathodes

Small, Volume 22, Issue 10, 17 February 2026.
Graphene edge cathodes, with atomically sharp edges, high carrier mobility, and electrostatically tunable electronic structure, enable a nanoscale vacuum transistor whose off‐channel gate directly modulates the emitter work function. The device achieves gate‐tunable current saturation from 10 to 300 K, low leakage, and amplification behavior enabled by
Cheul Hyun Yoon, Jun Yeong Choe, Yeong Jin Ahn, Gil Su Jeon, Byoung Don Kong   +4 more
wiley   +1 more source