Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater.
Chyow-San Chiou +4 more
doaj +1 more source
An alternative method for the determination of siloxane activities toward basic equilibration catalysts [PDF]
The method used is based on the well-known fact that siloxane equilibrates once formed, do not change their compositions unless some siloxane compound is added, in which case new equilibrium compositions appear.
Govedarica Milutin N.
doaj +3 more sources
TMAH/IPA anisotropic etching characteristics
The main advantages of tetramethyl ammonium hydroxide (TMAH)-based solutions is their full compatibility with IC technologies. In this work a new etching system of TMAH/IPA (isopropyl alcohol) is suggested. The influence of the addition of IPA to TMAH solutions on their etching characteristics is presented.
Merlos Domingo, Ángel +4 more
openaire +2 more sources
Facile synthesis of multi-layer graphene by electrochemical exfoliation using organic solvent
This paper presents a facile method of producing graphene nanosheets by organic liquid-assisted electrochemical exfoliation using tetramethyleammonium hydroxide (TMAH) as organic electrolyte.
Das Swapan +3 more
doaj +1 more source
Mathematical modeling of transesterification process kinetics of triglycerides catalyzed by TMAH [PDF]
Biodiesel is a renewable fuel mainly produced by methylation of triglycerides of vegetable oils or animal fats. The production processes nowadays are particularly based on the utilization of inorganic alkali catalysts. However, it has been proved that an
Šánek Lubomír +3 more
doaj +1 more source
Investigating the Effects of Gel Casting Parameters on the Suspension Rheology and Mechanical Properties of Titanium Carbide Green Body [PDF]
In this paper the chemo-rheological behavior of aqueous TiC suspension and physical properties of gelcasted green body were investigated. The monomer system used in this project was acrylamide (AM) and methylenebisacrylamide (MBAM).
H. Foratirad +2 more
doaj +1 more source
Anaerobic treatment of tetra-methyl ammonium hydroxide (TMAH) containing wastewater
Toxicity of tetra-methyl ammonium hydroxide (TMAH) was investigated in an upflow anaerobic sludge bed (UASB) by anaerobic toxicity assay test. System performance was determined by monitoring total organic carbon (TOC) and ion chromatograph (IC) analysis.
You, H.S. +3 more
core +1 more source
Systematic study of the etching characteristics of Si{111} in modified TMAH
Wet bulk micromachining on Si{111} is done to fabricate simple to complex microstructures for applications in sensors and actuators. In this work, it has been performed a systematic study of Si{111} in modified 5 wt% tetramethyl-ammonium hydroxide (TMAH)
V. Swarnalatha +6 more
semanticscholar +1 more source
High Performance Organic-Nanostructured Silicon Hybrid Solar Cell with Modified Surface Structure
Silicon nanowires (SiNWs) with excellent light trapping properties have been widely applied in photovoltaic devices, which provide opportunities for boosting the photons harvested by Si.
Xiaoli Duan +2 more
doaj +1 more source
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications in the field of microelectromechanical systems (MEMS).
Prem Pal +5 more
doaj +1 more source

