Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater.
Chyow-San Chiou +4 more
doaj +1 more source
Mathematical modeling of transesterification process kinetics of triglycerides catalyzed by TMAH [PDF]
Biodiesel is a renewable fuel mainly produced by methylation of triglycerides of vegetable oils or animal fats. The production processes nowadays are particularly based on the utilization of inorganic alkali catalysts. However, it has been proved that an
Šánek Lubomír +3 more
doaj +1 more source
Micromachined two dimensional resistor arrays for determination of gas parameters [PDF]
A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient ...
Dijkstra, Marcel +7 more
core +2 more sources
Investigating the Effects of Gel Casting Parameters on the Suspension Rheology and Mechanical Properties of Titanium Carbide Green Body [PDF]
In this paper the chemo-rheological behavior of aqueous TiC suspension and physical properties of gelcasted green body were investigated. The monomer system used in this project was acrylamide (AM) and methylenebisacrylamide (MBAM).
H. Foratirad +2 more
doaj +1 more source
TMAH/IPA anisotropic etching characteristics
The main advantages of tetramethyl ammonium hydroxide (TMAH)-based solutions is their full compatibility with IC technologies. In this work a new etching system of TMAH/IPA (isopropyl alcohol) is suggested. The influence of the addition of IPA to TMAH solutions on their etching characteristics is presented.
Merlos Domingo, Ángel +4 more
openaire +2 more sources
Facile synthesis of multi-layer graphene by electrochemical exfoliation using organic solvent
This paper presents a facile method of producing graphene nanosheets by organic liquid-assisted electrochemical exfoliation using tetramethyleammonium hydroxide (TMAH) as organic electrolyte.
Das Swapan +3 more
doaj +1 more source
Fabrication of recessed-gate AlGaN/GaN MOSFETs using TMAH wet etching with Cu ion implantation
In this study, recessed-gate AlGaN/GaN MOSFETs were fabricated using a novel recess etching method––TMAH wet etching with Cu ion implantation. This innovative approach injects Cu ions selectively into the target AlGaN layer, creating defects that are ...
Jun Hyeok Heo +5 more
doaj +1 more source
AlGaN /GaN superlattice based p-channel field effect transistor (pFET) with TMAH treatment
To realize the full spectrum of advantages that the III-nitride materials system offers, the demonstration of p-channel III-nitride based devices is valuable.
Hatui, Nirupam +6 more
core +1 more source
Proton Availability at the Air/Water Interface [PDF]
The acidity of the water surface sensed by a colliding gas is determined in experiments in which the protonation of gaseous trimethylamine (TMA) on aqueous microjets is monitored by online electrospray mass spectrometry as a function of the pH of the ...
Colussi, A. J. +2 more
core +2 more sources
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications in the field of microelectromechanical systems (MEMS).
Prem Pal +5 more
doaj +1 more source

