Results 61 to 70 of about 16,351 (259)

Wet and dry etching of Sc2O3

open access: yesApplied Surface Science, 2001
Abstract Wet chemical and plasma etch processes were developed for pattering of Sc2O3 films on GaN. Chlorine-based plasma chemistries produced a significant chemical enhancement of removal rate over pure Ar sputtering. The etching was anisotropic and did not significantly alter the surface composition of the Sc2O3 films.
Department of Materials Science and Engineering, University of Florida Rhines Hall, P.O. Box 116400, Gainesville, FL 32611, USA ( host institution )   +10 more
openaire   +2 more sources

Magnesium‐Based Transient Bioelectronics, Bio‐Optics and Bio‐Scaffolds

open access: yesAdvanced Functional Materials, EarlyView.
This paper reviews the state of the art and recent advances in magnesium‐based thin‐film, foils, and scaffolds for applications in transient bio‐optics, bioelectronics and tissue engineering. The design principles, fabrication methods, material properties, and integration strategies are discussed in detail.
Massimo Mariello, Yves Leterrier
wiley   +1 more source

Graphene Quantum Dot‐Induced Microstrain for Framework Stabilization of High‐Entropy Prussian Blue Analog in High‐Current Alkaline Hydrogen Evolution Reaction

open access: yesAdvanced Functional Materials, EarlyView.
The intrinsic distortion‐rich lattice of HEPBA with GQD‐enabled microstrain engineering establishes a mechanistic route toward high‐performance alkaline hydrogen evolution reaction. HEPBA inherently feature heterogeneous local coordination environments arising from multimetal incorporation, while properly introducing GQD during coprecipitation ...
Mia Rinawati   +10 more
wiley   +1 more source

Quasi-periodic micro-lens array via laser-assisted wet etching

open access: yesAIP Advances, 2022
A close-packed micro-lens array (MLA) is widely used not only in novel optical systems but also in various engineering fields, such as semiconductors and display devices.
Gi Hyeon Baek   +2 more
doaj   +1 more source

Multimode Oxide‐Based Optoelectronic Memtransistor for In‐Sensor Vision Processing

open access: yesAdvanced Functional Materials, EarlyView.
A multimode optoelectronic memtransistor (OEMT) is demonstrated for vision explainable artificial intelligence (VXAI) hardware. By integrating optical sensing, electrical masking, and non‐volatile memory, the device enables key operations required for generating saliency information.
Min Gu Lee   +10 more
wiley   +1 more source

A study on chromium thin film with positive photoresist as a masking layer towards the wet bulk micromachining of Borofloat glass

open access: yesMicro and Nano Systems Letters
Bulk micromachining is commonly used to fabricate microstructures such as deep cavities, through-holes, and microchannels in glass wafers, which have diverse applications in the areas of science and technology.
Vishal Sahu   +5 more
doaj   +1 more source

Fabrication of a novel quartz micromachined gyroscope

open access: yesAIP Advances, 2015
A novel quartz micromachined gyroscope is proposed in this paper. The novel gyroscope is realized by quartz anisotropic wet etching and 3-dimensional electrodes deposition.
Liqiang Xie   +3 more
doaj   +1 more source

Wet anisotropic etching characteristics of Si{111} in NaOH-based solution for silicon bulk micromachining

open access: yesMicro and Nano Systems Letters, 2022
Silicon bulk micromachining is extensively employed method in microelectromechanical systems (MEMS) for the formation of freestanding (e.g., cantilevers) and fixed (e.g., cavities) microstructures.
S. Purohit   +3 more
doaj   +1 more source

Silicone Phase Behavior Resolves the Softness–Surface Functionality Trade‐Off in Emerging Stretchable Electronics

open access: yesAdvanced Functional Materials, EarlyView.
Ultrasoft silicone elastomers often sacrifice surface functionality for mechanical compliance. In Mold Star, low‐molecular‐weight species form a dispersed phase that weakens the network and passivates the surface. Solvent extraction removes this phase, unexpectedly improving both extensibility and metallization performance, enabling conductive ...
Gloria M. D'Amaral   +7 more
wiley   +1 more source

Reconstructing Quantum Dot Surfaces via Dual‐Functional Ligand Pairing Enables Efficient Shortwave Infrared Optoelectronics

open access: yesAdvanced Functional Materials, EarlyView.
This work presents a ligand‐pairing strategy that reconstructs lead sulfide quantum dot surfaces for efficient short‐wave infrared optoelectronics. A low‐reactivity thiourea precursor combined with hydrobromic acid enables monodisperse and fully passivated quantum dots.
Dongeon Kim   +16 more
wiley   +1 more source

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