Results 1 to 10 of about 1,086 (73)

Kilovolt-class β-Ga2O3 MOSFETs on 1-in. bulk substrates

Applied Physics Letters, 2023
We report on the demonstration of β-Ga2O3 MOSFETs fabricated on 1-in. bulk substrates using metalorganic vapor phase epitaxy (MOVPE) with disilane (Si2H6) as the silicon precursor. Sheet charge uniformity of the as-grown films was measured via Hall and ranged from 5.9–6.7 × 1012 cm−2 with a uniform Hall mobility of 125–129 cm2/V s across the sample ...
Carl Peterson, Fikadu Alema, Arkka Bhattacharyya, Ziliang Ling, Saurav Roy, Andrei Osinsky, Sriram Krishnamoorthy   +6 more
openaire   +1 more source

Nucleation-Accelerated Epitaxy at Large-Area (100) β‑Ga₂O₃ Terraces. [PDF]

ACS Omega
Im S, Choe B, Kim H, Ji G, Kang M, Kang H, Jeen H, Kuznetsov A, Park S, Ok JM.   +9 more
europepmc   +1 more source

Interpretable self-driving sputtering epitaxy reveals human-usable growth rules for β-Ga₂O₃ films. [PDF]

Nat Commun
Wakabayashi YK, Ogawa Y, Romero FB, Wagner C, Otsuka T, Taniyasu Y.   +5 more
europepmc   +1 more source

Formation of near-vertical trenches and fins with flat {-201} sidewalls on (512) β-Ga₂O₃ via TMAH wet etching. [PDF]

Sci Technol Adv Mater
Oshima T.
europepmc   +1 more source

Wet etching of (-102) β-Ga₂O₃ with tetramethylammonium hydroxide (TMAH). [PDF]

Sci Technol Adv Mater
Oshima T.
europepmc   +1 more source

Dopant Molecularization in β-Ga₂O₃: Formation of N₂ under Nonequilibrium Conditions. [PDF]

J Phys Chem Lett
Demchenko IN, Shokri A, Syryanyy Y, Melikhov Y, Chernyshova M, Turek M, Droździel A, Munnik F, Jakieła R, Minikayev R, Domagala JZ, Derkachova A, Zaja̧c M, Krajczewski J, Grzanka E, Galazka Z.   +15 more
europepmc   +1 more source

Electro-Thermal Improvement in a β-Ga₂O₃ Cage-Integrated Slanted-Fin MOSFET. [PDF]

Micromachines (Basel)
Li J, Li Y, Peng K, Lu X, Ma X.
europepmc   +1 more source

Two-terminal β-Ga₂O₃ photo-synapse for diversified in-sensor computing via self-trapped holes engineering. [PDF]

Light Sci Appl
Nie Y, Jiao S, Yang X, Gao S, Wang D, Li Y, Wang J, Zhao L.   +7 more
europepmc   +1 more source

Single-Crystalline High-Quality β‑Ga₂O₃ Pseudosubstrate on Sapphire through Sputtering for Epitaxial Deposition. [PDF]

ACS Appl Eng Mater
Wang G, Xie S, Brand W, Khan SA, Ibreljic A, Shima D, Ma Y, Challa B, Sanyal S, Alema F, Osinsky A, Bhuiyan A, Balakrishnan G, Pasayat SS.   +13 more
europepmc   +1 more source

Defect-Polarization Coupling in 3D-Graphene/β-Ga₂O₃ Heterostructures for Self-Powered and Multifunctional Solar-Blind Ultraviolet Photodetection. [PDF]

Small
Zhu F, Wang Y, Li Z, Cao G, Ma H, Qian K, Li S, Zhang J, Lian S, Zheng L, He P, Zhao Y, Gao M, Xu W, Wang X, Wang G.   +15 more
europepmc   +1 more source