Results 81 to 90 of about 280,313 (347)

Evidence for hydrogen two-level systems in atomic layer deposition oxides

open access: yes, 2013
Two-level system (TLS) defects in dielectrics are known to limit the performance of electronic devices. We study TLS using millikelvin microwave loss measurements of three atomic layer deposited (ALD) oxide films--crystalline BeO ($\rm{c-BeO ...
Banerjee, S. K.   +12 more
core   +1 more source

Modeling the conformality of atomic layer deposition: the effect of sticking probability [PDF]

open access: yes, 2009
The key advantage of atomic layer deposition (ALD) is undoubtedly the excellent step coverage, which allows for conformal deposition of thin films in high-aspect-ratio structures. In this paper, a model is proposed to predict the deposited film thickness
Deduytsche, Davy   +4 more
core   +1 more source

Luminescent YbVO4 by atomic layer deposition [PDF]

open access: yesDalton Transactions, 2017
Thin films of YbVO4 displaying UV to NIR down conversion have been deposited by atomic layer deposition and crystallized through a flux aided process.
Michael Getz   +4 more
openaire   +4 more sources

Development of Aluminum Scandium Alloys for Hydrogen Storage Valves

open access: yesAdvanced Engineering Materials, EarlyView.
Different aluminum alloy series and various aluminum‐scandium alloys with differing Sc and Zr levels are evaluated for use in hydrogen storage valve production. The alloys undergo hardness testing, optical microscopy, and tensile strength analysis, with hardening behavior studied under varying conditions.
Francisco García‐Moreno   +4 more
wiley   +1 more source

Al2O3 on WSe2 by ozone based atomic layer deposition: Nucleation and interface study

open access: yesAPL Materials, 2017
In this work, the atomic layer deposition process using ozone and trimethylaluminum (TMA) for the deposition of Al2O3 films on WSe2 was investigated. It was found that the ozone-based atomic layer deposition enhanced the nucleation of Al2O3 in comparison
Angelica Azcatl   +3 more
doaj   +1 more source

High-Temperature Atomic Layer Deposition of GaN on 1D Nanostructures

open access: yesNanomaterials, 2020
Silica nanosprings (NS) were coated with gallium nitride (GaN) by high-temperature atomic layer deposition. The deposition temperature was 800 °C using trimethylgallium (TMG) as the Ga source and ammonia (NH3) as the reactive nitrogen source.
Aaron J. Austin   +8 more
doaj   +1 more source

Reduction of magnetostatic interactions in self-organized arrays of nickel nanowires using atomic layer deposition

open access: yes, 2011
Ordered arrays of magnetic nanowires are commonly synthesized by electrodeposition in nanoporous alumina templates. Due to their dense packing, strong magnetostatic interactions prevent the manipulation of wires individually.
Cagnon, Laurent   +3 more
core   +3 more sources

Wafer Bonding Technologies for Microelectromechanical Systems and 3D ICs: Advances, Challenges, and Trends

open access: yesAdvanced Engineering Materials, EarlyView.
This review explores wafer bonding technologies, covering wafer preparation, activation methods, and bonding mechanisms. It compares direct and indirect bonding, highlights recent advancements and future trends, and examines applications in 3D integration and packaging.
Abdul Ahad Khan   +5 more
wiley   +1 more source

Atomic Layer Deposition of ZrO2 on Titanium Inhibits Bacterial Adhesion and Enhances Osteoblast Viability

open access: yesInternational Journal of Nanomedicine, 2021
Yujin Jo,1 Yong Tae Kim,2 Hoonsung Cho,2 Min-Kyung Ji,3 Jaeyeong Heo,2,3 Hyun-Pil Lim1 1Department of Prosthodontics, School of Dentistry, Chonnam National University, Gwangju, Korea; 2Department of Materials Science and Engineering, Chonnam National ...
Jo Y   +5 more
doaj  

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