Results 81 to 90 of about 29,849 (211)
Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It. [PDF]
ACS Mater Au, 2023 Weber M +7 more
europepmc +1 more source
Atomic Layer Deposition (ALD) of Alumina over Activated Carbon Electrodes Enabling a Stable 4 V Supercapacitor Operation. [PDF]
ChemistryOpen, 2021 Gandla D +4 more
europepmc +1 more source
MethodsX, 2019 This paper reports on light yield enhancement of terbium-doped gadolinium oxysulfide based scintillator screens achieved by coating their substrates with thin layers of a high density and high atomic number material.
Jan Crha +4 more
doaj +1 more source
Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications
, 2017 We report on the development and application of an atomic layer etching (ALE) procedure based on alternating exposures of trimethylaluminum and anhydrous hydrogen fluoride (HF) implemented to controllably etch aluminum oxide. Our ALE process utilizes the
Balasubramanian, Kunjithapatham +5 more
core +1 more source
Atomic Layer Deposition of Inorganic Thin Films on 3D Polymer Nanonetworks
Applied Sciences, 2019 Atomic layer deposition (ALD) is a unique tool for conformally depositing inorganic thin films with precisely controlled thickness at nanoscale. Recently, ALD has been used in the manufacture of inorganic thin films using a three-dimensional (3D ...
Jinseong Ahn +3 more
doaj +1 more source
CoatingsAblative materials are widely employed to protect space vehicles from the extreme thermal conditions experienced during their flight into a planetary atmosphere. Carbon-phenolic ablators are composed of a phenolic matrix and a fibrous carbon reinforcement.
Rita Bottacchiari +5 more
openaire +1 more source
High-quality cobalt thin films by plasma-enhanced atomic layer deposition [PDF]
High-quality Co films with low resistivity (10 mu Omega cm) were deposited by plasma-enhanced atomic layer deposition (PE-ALD) from metallorganic precursors and NH3 plasma. The deposition characteristics and film properties were investigated. Especially,
Kim, H, Lee, HBR
core +1 more source
Passivation of germanium surface using ALD [PDF]
, 2014 Práce se zabývá pasivací povrchu germania pomocí chemického leptání a metodou depozice atomárních vrstev (ALD). Sledována byla především rychlost oxidace povrchu germania a zastoupení jednotlivých oxidů germania po použití vybraných metod pasivace ...
Kuba, Jakub
core
Synthesis of a 3D network of Pt nanowires by atomic layer deposition on carbonaceous template
, 2014 The formation of a 3D network composed of free standing and interconnected Pt nanowires is achieved by a two-step method, consisting of conformal deposition of Pt by atomic layer deposition (ALD) on a forest of carbon nanotubes and subsequent removal of ...
Bals, Sara +8 more
core +1 more source
Gas Transport Optimization for Atomic Layer Deposition Processes (ALD)
, 2021 [ES] El proyecto se centra en la optimización del flujo en procesos ALD. Para ello se pretenden mejorar tanto el tiempo de un ciclo completo como la uniformidad de la capa depositada. El método de optimización se desarrollará haciendo uso de un benchmark validable y, posteriormente, será aplicado al reactor ALD. Mediante el software CFD Ansys Fluent se
openaire +2 more sources