Results 271 to 280 of about 32,799 (288)

DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process

Microelectronic Engineering, 2018
Bingdong Chang, Flemming Jensen, Jörg Hübner   +2 more
exaly  

Effects of Ar Addition on the Etch Rates and Etch Profiles of Si Substrates During the Bosch Process

Korean Chemical Engineering Research, 2013
Sung-Woon Cho, Chang-Koo Kim
exaly  

Downstream transfer of the Haber-Bosch process

2012
openaire   +1 more source

Study of Various PhotoResist for Bosch Process

2019
Pageau, Arnaud, Curley, Garrett, Tilmant, Pascal, Vaurette, Francois, Yarekha, Dmitri   +4 more
openaire   +1 more source

The Arduous Way to the Haber–Bosch Process

Zeitschrift für anorganische und allgemeine Chemie, 2012
openaire   +1 more source

Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method

Microsystem Technologies, 2014
Zai-Fa Zhou, Qing-An Huang, Zhou Zai-Fa   +2 more
exaly  

The Haber-Bosch Process and the Development of Chemical Engineering

1982
openaire   +1 more source

Three-dimensional level set based Bosch process simulations using ray tracing for flux calculation

Microelectronic Engineering, 2010
Otmar Ertl, S Selberherr
exaly  

Recent Advances in Ammonia Synthesis: From Haber‐Bosch Process to External Field Driven Strategies

ChemSusChem
Xiaoyue Mu, Lu Li
exaly  

A Modified Bosch Process of SF6/C4F8/O2 ICP-RIE Si Etching

Journal of Materials Engineering and Performance
Luhua Chen, Jinhui Song, Song Jinhui
exaly