Results 261 to 270 of about 266,768 (294)
Some of the next articles are maybe not open access.
Optimization of Bosch etch process for through wafer interconnects
Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488), 2004The Bosch etch process was utilized to create 50 micrometer vias with an aspect ration of 10:1 in silicon wafers for through wafer interconnects. The process is complex with twenty-two separate parameters required to control the process. Deviating from the standard process and flowing SF/sub 6/ during the deposition process resulted in a more stable ...
L. Kenoyer, R. Oxford, A. Moll
openaire +1 more source
2022
Industry 4.0 takes advantage of data-driven approaches to improve manufacturing processes. Root cause analysis (RCA) techniques are naturally required to support the identification of reasons for (in)efficiency processes. However, RCA methods tend to be sensitive to data perturbations and outliers, compromising the confidence of the results and ...
Ângela F. Brochado +2 more
openaire +2 more sources
Industry 4.0 takes advantage of data-driven approaches to improve manufacturing processes. Root cause analysis (RCA) techniques are naturally required to support the identification of reasons for (in)efficiency processes. However, RCA methods tend to be sensitive to data perturbations and outliers, compromising the confidence of the results and ...
Ângela F. Brochado +2 more
openaire +2 more sources
Haber-Bosch and Other Industrial Processes
2004The Haber process, in the past more often referred to as the Haber-Bosch process, is one of the towering achievements of industrial chemistry. It has enabled us to produce enough nitrogen fertiliser to feed the current world population, to provide enough explosive to fight as many minor wars as seems desirable to desperate enough people, and to be able
openaire +1 more source
Bosch: Process Mining—A Corporate Consulting Perspective
2020As a large corporation and global player, Bosch has several Process Mining use cases implemented, in different business divisions, across different continents, and in various process types, e.g. P2P, O2C, production, and ticketing. The Bosch Process Mining setup can be characterized as a top-management-driven central approach. Planning and execution is
openaire +1 more source
(Invited) Ammonia Production Beyond Haber-Bosch Process
ECS Meeting Abstracts, 2019Ammonia has been an important chemical precursor for agriculture and other applications for about a century. It is estimated that about 180 million tons of ammonia is produced annually, and over 90% of the ammonia is produced via the Haber-Bosch (HB) process.
Liangzhu Zhu +4 more
openaire +1 more source
Simulation of the Bosch process with a string–cell hybrid method
Journal of Micromechanics and Microengineering, 2004This paper presents a new two-dimensional (2D) simulator, which can simulate the etching polymerization alternation in the Bosch process for an infinite trench. Physical models for etching and deposition are developed. Having been implemented with these models and a string–cell hybrid method based on string structure and cell structure, this simulator ...
Rongchun Zhou +3 more
openaire +1 more source
The industrialization of the Haber-Bosch process
Chemical & Engineering News, 2023openaire +1 more source
Gaussian Process models for Virtual Metrology of the Bosch Process
The increasing complexity of plasma etching in semiconductor manufacturing, particularly in the Bosch process, presents significant challenges for traditional metrology techniques. Conventional measurement-based approaches struggle with scalability, high latency, and reduced accuracy, making real-time process monitoring challenging.openaire +1 more source
An overview of the Haber-Bosch Process for Ammonia Production
2023Ramdhaw, Kiara +2 more
openaire +1 more source