Results 191 to 200 of about 19,083 (259)
Ferroelectric Rashba semiconductors promise ultralow‐power devices but lack industry‐quality films. This work demonstrates CMOS‐compatible fabrication of high‐quality α‐GeTe(111) films via magnetron sputtering, enabled by a 5 nm Sb2Te3 seed layer. Structural and ferroelectric analyses show robust, switchable polarization comparable to MBE films, paving
Jules Lagrave +14 more
wiley +1 more source
Chemical Mechanical Lapping of 316 Based on Solid-Phase Fenton Reaction. [PDF]
Guo L +6 more
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Lapping of Soft-Brittle Lithium Niobate Crystal with Fixed Abrasive Pad. [PDF]
Zhu N, Gao X, Tang C, Chen J, Zhu Y.
europepmc +1 more source
Laser-Based Polishing of Additively Manufactured PA12 and PAEK Polymer Components Using a Robotic System. [PDF]
Uluz E, Metz L, Hedwig L, Bremen S.
europepmc +1 more source
Effectiveness of electropolishing step on elimination of upstream manufacturing material residues on metallic orthopaedic medical device. [PDF]
Godlewska K +5 more
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Electro-chemical mechanical polishing of copper and chemical mechanical polishing of glass
Journal of Materials Processing Technology, 2004Abstract In IC and optical manufacturing some of the materials that are polished after grinding are Si, Ge, Pyrex and BK 7 glass. In the case of Al, Cu and W, they are deposited and are CMP polished. The polishing process used on IC wafers is chemical mechanical polishing (CMP) that has in built facilities for planarizing as well. There are two major
Venkatesh, Vasisht C. +2 more
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Mechanical Mechanisms of Chemical Mechanical Polishing
Advanced Materials Research, 2008This paper describes a mechanical mechanism of chemical mechanical polishing (CMP) and the model is applied to the polishing of silicon substrates by polyurethane pads and slurries containing fumed silica as is typically done in the manufacture of integrated circuits.
Steven Danyluk, Sum Huan Ng
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Surface Conformable Polishing Mechanism for Chemical Mechanical Polishing
Journal of The Electrochemical Society, 2009Surface conformable polishing mechanism, which means a uniform removal mechanism conforming to wafer thickness variation, was developed for chemical mechanical polishing. The polishing mechanism provides both global uniform removal regardless of wafer curvature and local planarization to protruding parts on a patterned surface.
Takashi Fujita, Junji Watanabe
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Mechanism of Ge2Sb2Te5 chemical mechanical polishing
Applied Surface Science, 2012Abstract We report the exploration of Ge2Sb2Te5 (GST) chemical mechanical polishing (CMP) mechanism. Static etching experiments of GST film were first conducted in two typical silica-based slurries (pH 2 and pH 11). To investigate the chemical nature of GST in different chemical environments, solubility of GST in slurries and also the zeta potentials
Liangyong Wang +7 more
openaire +1 more source

