Results 211 to 220 of about 19,083 (259)

CHEMICAL MECHANICAL POLISHING COMPOSITION AND CHEMICAL MECHANICAL POLISHING METHOD

2022
YAMADA YUUYA, WANG PENGYU, SUGIE NORIHIKO, KAMEI YASUTAKA   +3 more
openaire   +1 more source

Novel rotary chemical mechanical polishing on an integral impeller

Journal of Manufacturing Processes, 2021
Yubiao Li, Fanning Meng
exaly  

Study on chemical mechanical polishing of silicon wafer with megasonic vibration assisted

Ultrasonics, 2017
Liang Li, Ke Zhai
exaly  

Chemical processes in the chemical mechanical polishing of copper

Materials Chemistry and Physics, 1995
S P Murarka, R J Gutmann
exaly  

Mechanisms of copper removal during chemical mechanical polishing

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1995
Gutmann R J, Duquette D J, Murarka S P
exaly  

Friction and thermal phenomena in chemical mechanical polishing

Journal of Materials Processing Technology, 2002
H D Jeong, E S Lee
exaly  

SLURRY FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD

2015
KATO MITSURU, OKAMOTO CHIHIRO, KATO SHINYA   +2 more
openaire   +2 more sources

Chemical-Mechanical Polish and Electrochemical-Mechanical Polishing

2013
openaire   +1 more source

Characterization of Cu chemical mechanical polishing by electrochemical investigations

Microelectronic Engineering, 1997
D Zeidler, K Drescher, M Plötner
exaly  

UV-TiO2 photocatalysis-assisted chemical mechanical polishing 4H-SiC wafer

Materials and Manufacturing Processes, 2018
Zewei Yuan, Xingwei Sun
exaly