Results 211 to 220 of about 20,386 (260)

CHEMICAL MECHANICAL POLISHING COMPOSITION AND CHEMICAL MECHANICAL POLISHING METHOD

2022
YAMADA YUUYA, WANG PENGYU, SUGIE NORIHIKO, KAMEI YASUTAKA   +3 more
openaire   +1 more source

Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries

Wear, 2021
Qixiang Zhang, Jisheng Pan, Jiabin Lu
exaly  

Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect

Applied Surface Science, 2022
Wantang Wang, Ru Wang, Nengyuan Zeng
exaly  

Study on chemical mechanical polishing of silicon wafer with megasonic vibration assisted

Ultrasonics, 2017
Liang Li, Ke Zhai
exaly  

Chemical processes in the chemical mechanical polishing of copper

Materials Chemistry and Physics, 1995
R J Gutmann
exaly  

Redox agent enhanced chemical mechanical polishing of thin film diamond

Carbon, 2018
Soumen Mandal, Laia Gines, Oliver Williams   +2 more
exaly  

UV-TiO2 photocatalysis-assisted chemical mechanical polishing 4H-SiC wafer

Materials and Manufacturing Processes, 2018
Zewei Yuan, Xingwei Sun
exaly  

Chemical mechanical polishing: Theory and experiment

Friction, 2013
Lu Xinchun, Dewen Zhao
exaly  

SLURRY FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD

2015
KATO MITSURU, OKAMOTO CHIHIRO, KATO SHINYA   +2 more
openaire   +2 more sources

Chemical-Mechanical Polish and Electrochemical-Mechanical Polishing

2013
openaire   +1 more source