Results 231 to 240 of about 20,386 (260)

Chemical Mechanical Polishing of Ta

Electrochemical and Solid-State Letters, 1999
openaire   +1 more source

Characterization of Cu chemical mechanical polishing by electrochemical investigations

Microelectronic Engineering, 1997
D Zeidler, K Drescher, M Plötner
exaly  

A chemical-mechanical polish for tungsten

Metallography, 1968
C. Newton, D.L. Olson
openaire   +1 more source

Polishing Characteristics of Hydrophilic Pad in Chemical Mechanical Polishing Process

Materials and Manufacturing Processes, 2012
Ming-Yi Tsai
exaly  

Mechanisms of copper removal during chemical mechanical polishing Available to Purchase

Journal of Vacuum Science & Technology B, 1995
R J Gutmann
exaly  

Chemical-mechanical polishing

2003
BABU SURYADEVARA V, JINDAL ANURAG, HEGDE SHARATH   +2 more
openaire   +1 more source

SLURRY COMPOSITION FOR PRIMARY CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD

2010
CHOI EUN-MI, SHIN DONG-MOK, CHO SEUNG-BEOM   +2 more
openaire   +1 more source

Chemical mechanical polishing apparatus and methods for chemical mechanical polishing

2007
openaire   +1 more source

Chemical mechanical polishing slurry and chemical mechanical polishing process using the same

2020
openaire   +1 more source

Polishing slurries and methods for chemical mechanical polishing

2007
CHANDRA SUNIL, NIMMALA SREEHARI, BABU SURYADEVARA VIJAYAKUMAR, PATRI UDAYA B, HEDGE SHARATH, HONG YOUNGKI   +5 more
openaire   +2 more sources