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Electrocoagulation of chemical mechanical polishing wastewater
Desalination, 2007Hakim Lounici, N Ghaffour
exaly
Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces
CIRP Annals - Manufacturing Technology, 2009H D Jeong
exaly
A chemical-mechanical polish for tungsten
Metallography, 1968C. Newton, D.L. Olson
openaire +1 more source
Chemical mechanical polishing of integrated circuits
1994van Kranenburg, H. +3 more
openaire +2 more sources
Chemical mechanical polishing apparatus and methods for chemical mechanical polishing
2007openaire +1 more source

