Results 251 to 260 of about 18,989 (261)

Surface Chemical Processes in Chemical Mechanical Polishing

Journal of The Electrochemical Society, 2002
openaire   +1 more source

Chemical Mechanical Polishing of Gold

2012
openaire   +1 more source

Polishing Performance and Mechanism of a Novel Fe-Based Slurry for Chemical Mechanical Polishing

Tribology International
Shidong Chen, Hong Lei
openaire   +1 more source

Mechanism of chemical and mechanical action in chemical mechanical polishing of KDP crystal

The International Journal of Advanced Manufacturing Technology
Xiao Lu, Mingen Zhao, Hongyan Zhao, Chao Tang, Zhi Yu, Lan Li, Jun Li   +6 more
openaire   +1 more source

Chemical Effect Mechanism in Chemical Mechanical Polishing of Silicon Wafer

2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
Xuejie Wang, Chenwei Wang, Xing Li, Lijiao Jiang, Shuangshuang Lei   +4 more
openaire   +1 more source

Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy

Tribology International
Ning Huang
exaly  

Surface microtopography evolution of monocrystalline silicon in chemical mechanical polishing

Journal of Materials Processing Technology
Ning Huang
exaly  

CMP – Chemical-Mechanical Polishing

2013
openaire   +1 more source

Chemical and physical mechanisms of dielectric chemical mechanical polishing (CMP)

2016
openaire   +1 more source

Chemical Mechanical Polishing of Copper

2001
openaire   +1 more source