Results 251 to 260 of about 20,386 (260)

Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy

Tribology International
exaly  

Chemical mechanical polishing conditioner

2015
WU JIANHUI, HALL RICHARD W J, SCHULZ ERIC M, RAMANATH SRINIVASAN   +3 more
openaire   +1 more source

Surface microtopography evolution of monocrystalline silicon in chemical mechanical polishing

Journal of Materials Processing Technology
exaly  

Copper Chemical Mechanical Polishing

1998
openaire   +1 more source

Chemical mechanical polishing method

2013
WU KUN-LIN, TSAI MENG-JIN
openaire   +1 more source

Chemical mechanical polishing pads

2009
openaire   +1 more source

Chemical mechanical polishing composition

DAESCHLEIN CHRISTIAN, SIEBERT MAX, LAN YONGQING, LAUTER MICHAEL, USMAN IBRAHIM SHEIK ANSAR, GOLZARIAN REZA M, WEI TE YU, GUEVENC HACI OSMAN, PROELSS JULIAN, LEUNISSEN LEONARDUS   +9 more
openaire   +1 more source

Chemical mechanical polishing apparatus

2011
openaire   +1 more source

Chemical mechanical polishing slurry

2005
openaire   +1 more source

Chemical Mechanical Polishing of Copper

2001
openaire   +1 more source