Results 241 to 250 of about 18,989 (261)

Contribution of ultrasonic traveling wave to chemical–mechanical polishing

Ultrasonics, 2015
Liang Li
exaly  

Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces

CIRP Annals - Manufacturing Technology, 2009
Hyunseop Lee, H D Jeong
exaly  

Polishing Characteristics of Hydrophilic Pad in Chemical Mechanical Polishing Process

Materials and Manufacturing Processes, 2012
Ming-Yi Tsai
exaly  

Characterization of Cu chemical mechanical polishing by electrochemical investigations

Microelectronic Engineering, 1997
D Zeidler, M Plötner, K Drescher
exaly  

Chemical mechanical polishing of steel substrate using colloidal silica-based slurries

Applied Surface Science, 2015
Liang Jiang, Jianbin Luo
exaly  

Chemical Mechanical Polishing (CMP)

2013
Steven Danyluk, Sum Huan Ng
openaire   +1 more source

Chemical-mechanical polishing technique

Metal Finishing, 1996
openaire   +1 more source

Chemical mechanical polishing of integrated circuits

1994
van Kranenburg, H., Vermeulen, S.T.J.A., Woerlee, P.H., Ruiter, E.   +3 more
openaire   +2 more sources

Simulation Model of Polishing Pressure in Chemical-Mechanical Polishing

The Proceedings of The Computational Mechanics Conference, 2018
Yuki NAKANO, Katsuhisa SUGIMORI, Kazuaki KOZASA, Jiro KAJIWARA, Takayuki KIHARA, Ryoya TERAKAWA, Katsutoshi YAMAMOTO   +6 more
openaire   +1 more source

Chemical Mechanical Polishing of Metal

1998
Nguyen Hoang, V., van Kranenburg, H., Woerlee, P.H.   +2 more
openaire   +3 more sources