Results 221 to 230 of about 19,083 (259)

Chemical mechanical polishing of steel substrate using colloidal silica-based slurries

Applied Surface Science, 2015
Jianbin Luo, Liang Jiang, Yongyong He
exaly  

Chemical mechanical polishing of titanium

Abstracts of the General Sessions of the Japanese Society for Dental Materials and Devices, 2002
Okawa, S., Nakano, S., Watanabe, K., Kanatani, M., Hossain, Awlad, Miyakawa, O., Kobayashi, M.   +6 more
openaire   +1 more source

Chemical Mechanical Polishing

2001
openaire   +1 more source

Polishing Characteristics of Hydrophilic Pad in Chemical Mechanical Polishing Process

Materials and Manufacturing Processes, 2012
Ming-Yi Tsai
exaly  

Contribution of ultrasonic traveling wave to chemical–mechanical polishing

Ultrasonics, 2015
Liang Li
exaly  

Chemical mechanical polishing: Theory and experiment

Friction, 2013
Xinchun Lu, Dewen Zhao, Lu Xinchun
exaly  

Fabrication of a polishing pad for chemical mechanical polishing

2023
LEE AN-HSUAN, SHE MING-SHIUAN, WU CHEN-HAO, LIAO CHUN-HUNG, LEE SHEN-NAN, TSAI TENG-CHUN   +5 more
openaire   +2 more sources

Chemical Mechanical Polishing of Ta

Electrochemical and Solid-State Letters, 1999
openaire   +1 more source

Chemical mechanical polishing method and chemical mechanical polishing device

2012
MIYATA MASANORI, USAMI TARO, SOGAWA KOICHI, NISHIHARA KENJI, UEHARA TADAO, CHIN SHISYO, TERATANI HIROAKI, SUZUKI AKINORI, KOHNO YUUICHI, OKADA TETSUYA, HARUKI TOHRU   +10 more
openaire   +1 more source

Improvement in polishing effect of silicon wafer due to low-amplitude megasonic vibration assisting chemical-mechanical polishing

Journal of Materials Processing Technology, 2019
Liang Li, Liang Li
exaly