Results 201 to 209 of about 6,173 (209)

Experimental investigation of chemical mechanical polishing (CMP) process parameters through polishing of optical glass

AIP Conference Proceedings
Aparajita Parashar, Manoj Kumar, Raj Kumar Pal, Vinod Karar   +3 more
openaire   +1 more source

Chemical Mechanical Polishing (CMP) of SiC Wafer Using Photo-Catalyst Incorporated Pad

ECS Journal of Solid State Science and Technology, 2017
Yan Zhou, Guoshun Pan, Chunli Zou, Lei Wang   +3 more
openaire   +1 more source

Review on copper chemical–mechanical polishing (CMP) and post-CMP cleaning in ultra large system integrated (ULSI)—An electrochemical perspective

Electrochimica Acta, 2007
Yair Ein-Eli
exaly  

Semi-empirical material removal rate distribution model for SiO2 chemical mechanical polishing (CMP) processes

Precision Engineering, 2013
exaly  

Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances

Wear, 2011
exaly  

Combined ultrasonic vibration and chemical mechanical polishing of copper substrates

International Journal of Machine Tools and Manufacture, 2012
exaly  

Experimental and theoretical computational study of corrosion inhibitors in the cobalt bulk chemical mechanical polishing (CMP) process

Journal of Molecular Liquids
Fan Zhang
exaly  

Abrasive-free and ultra-low abrasive chemical mechanical polishing (CMP) processes

2016
openaire   +1 more source

Enhanced chemical mechanical polishing (CMP) performance of porous self-assembled spherical cerium oxide via RE(La/Pr/Nd) doping

Applied Surface Science
exaly