Results 191 to 199 of about 7,532,110 (199)

Experimental Investigation on the Roles of Chemical Corrosion and Mechanical Polishing on Copper CMP

2008
Jhy-Cherng Tsai
exaly  

CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING A PROTEIN

2013
LI YUZHUO, NOLLER BASTIAN MARTEN, LAUTER MICHAEL, LANGE ROLAND   +3 more
openaire   +3 more sources

USE OF A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR POLISHING OF COBALT AND/OR COBALT ALLOY COMPRISING SUBSTRATES

2016
REICHARDT ROBERT, SIEBERT MAX, LAN YONGQING, LAUTER MICHAEL, USMAN IBRAHIM SHEIK ANSAR, GOLZARIAN REZA M, GUEVENC HACI OSMAN, PROELSS JULIAN, LEUNISSEN LEONARDUS   +8 more
openaire   +6 more sources

CMP: Chemical–Mechanical Polishing

2010
Sami Franssila
exaly  

Enhanced chemical mechanical polishing (CMP) performance of porous self-assembled spherical cerium oxide via RE(La/Pr/Nd) doping

Applied Surface Science
Xingzi Wang, Xianmin Tan, Yuanyuan Zheng
exaly  

Chemical mechanical polishing (CMP) platform for local profile control

2018
WU JIANN LIH, YANG CHI-MING, HWANG JAMES JENG-JYI   +2 more
openaire   +1 more source

Experimental and theoretical computational study of corrosion inhibitors in the cobalt bulk chemical mechanical polishing (CMP) process

Journal of Molecular Liquids
exaly  

Chemical mechanical polishing (CMP) composition for high effective polishing of substrates comprising germanium

2019
SIEBERT MAX, LAUTER MICHAEL, LAN YONGQING, REICHARDT ROBERT, MUENCH ALEXANDRA, SIX MANUEL, DANIEL GERALD, NOLLER BASTIAN MARTEN, HUANG KEVIN, USMAN IBRAHIM SHEIK ANSAR   +9 more
openaire   +1 more source

Chemical mechanical polishing (CMP) of SiC wafer utilizing catalyst in slurry

2014
Zhou, Yan, Pan, Guoshun, Luo, Guihai, Shi, Xiaolei, Zou, Chunli, Liu, Yuhong   +5 more
openaire   +1 more source