Results 181 to 190 of about 7,532,110 (199)

Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process

Microelectronic Engineering, 2006
Nam-Hoon Kim, Eui-Goo Chang, Sang-Yong Kim   +2 more
exaly  

Chemical evidences for the optimal coagulant dosage and pH adjustment of silica removal from chemical mechanical polishing (CMP) wastewater

Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2009
Ching-Yao Hu, Wen-Hui Kuan
exaly  

Experimental investigation of process parameters for roll-type linear chemical mechanical polishing (Roll-CMP) system

Precision Engineering, 2014
Haedo Jeong, Hyunseop Lee, Jaehong Park
exaly  

Chemical mechanical polishing (CMP) polishing solution with enhanced performance

2013
LI YUZHUO, PINDER HARVEY WAYNE, VENKATARAMAN SHYAM S   +2 more
openaire   +1 more source

Chemical mechanical polishing (CMP) mechanisms of thermal SiO film after high-temperature pad conditioning

Thin Solid Films, 2006
Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee
exaly  

Chemical mechanical polishing (CMP) composition comprising a specific heteropolyacid

2014
SCHMITT CHRISTINE, KARPOV ANDREY, ROSOWSKI FRANK, BRANDS MARIO, LI YUZHUO   +4 more
openaire   +2 more sources

OXIDE CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING COMPOSITIONS

2020
SHI XIAOBO, KRISHNA P MURELLA, JOSEPH D ROSE, ZHOU HONGJUN, O'NEILL MARK LEONARD   +4 more
openaire   +1 more source

Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectrics

2014
AMOAH YOBA, BATES GRAHAM M, HASSELBACH JOSEPH P, MCDEVITT THOMAS L, SHAH EVA A   +4 more
openaire   +1 more source

Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate

Wuji Cailiao Xuebao/Journal of Inorganic Materials, 2017
exaly  

A pilot plant study using ceramic membrane microfiltration, carbon adsorption and reverse osmosis to treat CMP (chemical mechanical polishing) wastewater

Water Science and Technology: Water Supply, 2004
exaly