Results 161 to 170 of about 1,061 (174)

Preparation of silane modified SiO2 abrasive particles and their Chemical Mechanical Polishing (CMP) performances

Wear, 2011
Guoshun Pan
exaly  

Experimental investigation of process parameters for roll-type linear chemical mechanical polishing (Roll-CMP) system

Precision Engineering, 2014
Hyunseop Lee, Haedo Jeong
exaly  

Chemical evidences for the optimal coagulant dosage and pH adjustment of silica removal from chemical mechanical polishing (CMP) wastewater

Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2009
Wen-Hui Kuan, Ching-Yao Hu
exaly  

Chemical mechanical polishing (CMP) mechanisms of thermal SiO2 film after high-temperature pad conditioning

Thin Solid Films, 2006
Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee   +2 more
exaly  

Design of experiment (DOE) method considering interaction effect of process parameters for optimization of copper chemical mechanical polishing (CMP) process

Microelectronic Engineering, 2006
Nam-Hoon Kim, Sang-Yong Kim, Eui-Goo Chang   +2 more
exaly  

Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate

Wuji Cailiao Xuebao/Journal of Inorganic Materials, 2017
exaly  

Characterization of Ceria Nanoparticles as Abrasives Applied with Defoaming Polymers for CMP (Chemical Mechanical Polishing) Applications

Polymers
Woonjung Kim
exaly  

A pilot plant study using ceramic membrane microfiltration, carbon adsorption and reverse osmosis to treat CMP (chemical mechanical polishing) wastewater

Water Science and Technology: Water Supply, 2004
exaly  

Experimental Investigation on the Roles of Chemical Corrosion and Mechanical Polishing on Copper CMP

2008
Jhy-Cherng Tsai, Tsai Jhy-Cherng
exaly  

Chemical mechanical polishing (CMP) of SiC wafer utilizing catalyst in slurry

2014
Zhou, Yan, Pan, Guoshun, Luo, Guihai, Shi, Xiaolei, Zou, Chunli, Liu, Yuhong   +5 more
openaire   +1 more source