Results 141 to 150 of about 14,575 (156)

Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates

2021
REICHARDT ROBERT, SIEBERT MAX, LAN YONGQING, LAUTER MICHAEL, USMAN IBRAHIM SHEIK ANSAR, GOLZARIAN REZA M, WEI TE YU, GUEVENC HACI OSMAN, PROELSS JULIAN, LEUNISSEN LEONARDUS   +9 more
openaire   +1 more source

Chemical mechanical polishing (CMP) composition comprising a specific heteropolyacid

2014
SCHMITT CHRISTINE, KARPOV ANDREY, ROSOWSKI FRANK, BRANDS MARIO, LI YUZHUO   +4 more
openaire   +2 more sources

Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP

International Journal of Machine Tools and Manufacture, 2018
Jing Lu, Yongchao Xu, Xipeng Xu
exaly  

Experimental Investigation on the Roles of Chemical Corrosion and Mechanical Polishing on Copper CMP

2008
Jhy-Cherng Tsai, Tsai Jhy-Cherng
exaly  

Chemical mechanical polishing: Theory and experiment

Friction, 2013
Xinchun Lu, Dewen Zhao, Lu Xinchun
exaly  

Chemical mechanical polishing (CMP) polishing solution with enhanced performance

2013
LI YUZHUO, PINDER HARVEY WAYNE, VENKATARAMAN SHYAM S   +2 more
openaire   +1 more source

OXIDE CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING COMPOSITIONS

2020
SHI XIAOBO, KRISHNA P MURELLA, JOSEPH D ROSE, ZHOU HONGJUN, O'NEILL MARK LEONARD   +4 more
openaire   +1 more source

Locally tailoring chemical mechanical polishing (CMP) polish rate for dielectrics

2014
AMOAH YOBA, BATES GRAHAM M, HASSELBACH JOSEPH P, MCDEVITT THOMAS L, SHAH EVA A   +4 more
openaire   +1 more source

Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate

Wuji Cailiao Xuebao/Journal of Inorganic Materials, 2017
exaly  

CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING A PROTEIN

2013
LI YUZHUO, NOLLER BASTIAN MARTEN, LAUTER MICHAEL, LANGE ROLAND   +3 more
openaire   +3 more sources