Results 121 to 130 of about 14,575 (156)

Material Removal Characteristics of Abrasive-Free Cu Chemical-Mechanical Polishing (CMP) Using Electrolytic Ionization via Ni Electrodes

Micromachines, 2023
Hyunseop Lee, Lee Hyunseop
exaly  

Review on copper chemical–mechanical polishing (CMP) and post-CMP cleaning in ultra large system integrated (ULSI)—An electrochemical perspective

, 2007
Y. Ein‐Eli, D. Starosvetsky
semanticscholar   +1 more source

AFM and XPS studies on material removal mechanism of sapphire wafer during chemical mechanical polishing (CMP)

Journal of materials science. Materials in electronics, 2015
Yan Zhou, G. Pan, Xiaolei Shi, H. Gong, Li Xu, C. Zou   +5 more
semanticscholar   +1 more source

DEVELOPMENT OF AN INTELLIGENT CHEMICAL-MECHANICAL POLISHING (CMP) SYSTEM

Abrasive Technology, 1999
Y. SAMITSU, K. KOBAYASHI, E. YAMAMOTO, E. KERBA, Y. HAYASHI, T. ONODERA   +5 more
openaire   +1 more source

Systematic Yield - Chemical Mechanical Polishing (CMP)

2007
Charles C. Chiang, Jamil Kawa
openaire   +1 more source

Chemical Mechanical Polishing (CMP) Processes for Manufacturing Optical Silicon Substrates with Shortened Polishing Time

, 2014
Z. Zhong, Y. B. Tian, J. H. Ng, Y. Ang
semanticscholar   +1 more source

Application of electrolytic in-process dressing (ELID) grinding and chemical mechanical polishing (CMP) process for emerging hard-brittle materials used in light-emitting diodes

, 2011
Hyunseop Lee, H. Kasuga, H. Ohmori, Hojun Lee, Haedo Jeong   +4 more
semanticscholar   +1 more source

Polishing Technique and CMP (Chemical & Mechanical Polishing) in Semiconductor Process

Journal of the Society of Mechanical Engineers, 2000
openaire   +1 more source

Evaluation of environmental impacts during chemical mechanical polishing (CMP) for sustainable manufacturing

, 2013
Hyunseop Lee, Sunjoon Park, Haedo Jeong
semanticscholar   +1 more source

Transformation of silica fume into chemical mechanical polishing (CMP) nano-slurries for advanced semiconductor manufacturing

, 2011
M. Rashad, M. Hessien, E. Abdel-Aal, K. El-Barawy, R. Singh   +4 more
semanticscholar   +1 more source