Results 121 to 130 of about 7,532,110 (199)

Prediction Model and Experimental Verification of Surface Roughness of Single Crystal Diamond Chemical Mechanical Polishing Based on Archimedes Optimization Algorithm. [PDF]

Micromachines (Basel)
Li Z, Guo X, Fan G, Deng Y, Kang R, Wang X.   +5 more
europepmc   +1 more source

Consideration of Pad Conditioning in CMP(Chemical–Mechanical Polishing)

Proceedings of JSPE Semestrial Meeting, 2006
Kamikawa, Daichi, Fujita, Takasi, Doi, Tosiro   +2 more
openaire   +1 more source

Effects of Hydrolysis Reaction and Abrasive Drag Force Accelerator on Enhancing Si-Wafer Polishing Rate and Improving Si-Wafer Surface Roughness. [PDF]

Nanomaterials (Basel)
Jeon MU, Kim PS, Han MH, Lee SH, Lee HM, Kim SB, Park JH, Cho KC, Park J, Park JG.   +9 more
europepmc   +1 more source

PFC Simulation and Experimental Investigation of Crack Evolution and Surface Morphology in Rehbinder-Effect-Assisted Longitudinal-Torsional Ultrasonic Vibration Milling of Borosilicate Glass. [PDF]

Materials (Basel)
Yi J, Wang R, Wang T, Liu X, Li C, Xiang J.   +5 more
europepmc   +1 more source

Material Removal Mechanism and Performance Evaluation of Focused Ultrasonic-Assisted Abrasive Waterjet Polishing (FUAP) of Monocrystalline Silicon. [PDF]

Materials (Basel)
Ren K, Yuan J, Li H, Miao Q, Wang Z, Liu Q, Liu X.   +6 more
europepmc   +1 more source

Wafer-Level Transfer of GaN-on-Si Light-Emitting Devices via SiO₂-SiO₂ Direct Bonding: Strain Evolution and Optoelectronic Performance. [PDF]

Micromachines (Basel)
Zhang S, Zhang S, Fan Q, Ni X, Gu X.
europepmc   +1 more source

Controllable Synthesis of Monodisperse CeO₂ Nanoparticles with Tunable Sizes for Chemical-Mechanical Polishing. [PDF]

ACS Omega
Ma Y, Qiu T, Zhao Z, Zou Q, Chen B, Sun Q, Zhao S.   +6 more
europepmc   +1 more source

Dual-Functional Metal Interlayer Enables High-Quality GaN Epitaxy and Low-Damage Transfer Towards Flexible Optoelectronics. [PDF]

Small Methods
Ma Y, Zheng Y, Zhu H, Jiang T, Sawan M, He S.   +5 more
europepmc   +1 more source

Magnetorheological Finishing Technology: Research Progress in Materials, Mechanisms, Equipment, and Intelligentization. [PDF]

Micromachines (Basel)
Ding L, Song G, Gao G, Shi D.
europepmc   +1 more source

Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy. [PDF]

Microsyst Nanoeng
Tian Z, Wang S, Li R, Sun X, Shen W, Liu S.   +5 more
europepmc   +1 more source