Results 101 to 110 of about 1,061 (174)

Effect of Structurally Modified Toluene Diisocyanate-Based Polyurethane Pads on Chemical Mechanical Polishing of 4H Silicon Carbide Substrate. [PDF]

Polymers (Basel)
Meng Y, Zhang S, Zhang Z.
europepmc   +1 more source

Synergistic Multi-Mechanism Enhancement in Chemomechanical Abrasive Polishing of Polycrystalline Diamond via a New SiO₂-Diamond Slurry in High-Concentration H₂O₂ Solution. [PDF]

Materials (Basel)
Zheng X, Zheng K, Gao J, Wang Y, An P, Ma Y, Hei H, Qu S, Yu S.   +8 more
europepmc   +1 more source

Multi-Field Characterisation of Material Removal Processes in Ultrasonic Magnetorheological Chemical Compound Polishing of GaN Wafers. [PDF]

Micromachines (Basel)
Liang H, Chen W, Fu Y, Zhou W, Mo L, Wen Q, Liu D, He J.   +7 more
europepmc   +1 more source

Ultra-Precise Dispensing for Rapid and Flexible Through-Silicon Via Filling. [PDF]

Materials (Basel)
Szczotka N, Nashashibi S, Motyka A, Drozdek S, Leuthold J, Malecha K.   +5 more
europepmc   +1 more source

Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive. [PDF]

Micromachines (Basel)
Li M, Jiao W, Huang K, Wang B, Dai Z, Gao Y, Cao H, Xie H.   +7 more
europepmc   +1 more source

Numerical Simulation and Experimental Study on Picosecond Laser Polishing of 4H-SiC Wafer. [PDF]

Micromachines (Basel)
Yan Y, Cheng Y, Chen S, Tang Y, Zhang F, Gao P.   +5 more
europepmc   +1 more source

Investigation the CMP process of 6 H-SiC in H₂O₂ solution with ReaxFF molecular dynamics simulation. [PDF]

Sci Rep
Gu Y, Feng K, Xu L, Zhao L, Zhao T, Lyu B.   +5 more
europepmc   +1 more source

A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing. [PDF]

Microsyst Nanoeng
Hao Y, Ding Y, Zhang Z, Yang B, Zhang J, Xie H, Chen Z.   +6 more
europepmc   +1 more source

Big data approaches, overcoming critical limitations, and enhanced optical and environmental stability of Al₂O₃/Ti/Al₂O₃ colored solar-selective absorber coatings. [PDF]

Sci Rep
Lai YT, Lai FD, Lin TY, Lai HC.
europepmc   +1 more source