Results 111 to 120 of about 6,173 (209)

Simulation Analysis of the Chemical Mechanical Polishing Process for Monocrystal 4H-Silicon Carbide Based on Molecular Dynamics. [PDF]

Micromachines (Basel)
Lei Y, Guo W, Feng K, Sun Z.
europepmc   +1 more source

A High-Efficiency Environmentally Friendly Polishing Slurry for K9 Glass Utilizing Cerium-Based Compounds. [PDF]

Molecules
Li S, Ye R, Zou Z, He Z, Feng K, Cui H, Chi R, Chen Y, Luo Y.   +8 more
europepmc   +1 more source

Flow-Induced Dynamic Dispersion in Dispersant-Free Mixed-Oxide Slurry Systems. [PDF]

Langmuir
Lin YA, Yeh FM, Hu B, Huang TK, Lu HH, Zhong H, Li CC.   +6 more
europepmc   +1 more source

Chemical Mechanical Polishing of Plasma-Modified Cu/Polymer Interfaces for Advanced Hybrid Bonding. [PDF]

Adv Sci (Weinh)
Kang S, Jeon C, Park J, Park S, Kim KM, Kim S.   +5 more
europepmc   +1 more source

Wettability-Controlled Hydrophobic Coating of CMP Component Using PTFE and DLC for Mitigating Slurry Agglomeration and Contamination. [PDF]

Micromachines (Basel)
Lee E, Sun K, So Y, Baek J, Shin JH, Kim HD, Youn YB, Kim MW.   +7 more
europepmc   +1 more source

Process Temperature Control for Low Dishing in CMP. [PDF]

Materials (Basel)
Shin Y, Jeong J, Shin J, Jeong H.
europepmc   +1 more source

Prediction Model and Experimental Verification of Surface Roughness of Single Crystal Diamond Chemical Mechanical Polishing Based on Archimedes Optimization Algorithm. [PDF]

Micromachines (Basel)
Li Z, Guo X, Fan G, Deng Y, Kang R, Wang X.   +5 more
europepmc   +1 more source

Controllable Synthesis of Monodisperse CeO₂ Nanoparticles with Tunable Sizes for Chemical-Mechanical Polishing. [PDF]

ACS Omega
Ma Y, Qiu T, Zhao Z, Zou Q, Chen B, Sun Q, Zhao S.   +6 more
europepmc   +1 more source

Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy. [PDF]

Microsyst Nanoeng
Tian Z, Wang S, Li R, Sun X, Shen W, Liu S.   +5 more
europepmc   +1 more source

YO nanosheets as slurry abrasives for chemical-mechanical planarization of copper [PDF]

core   +1 more source