Results 91 to 100 of about 1,061 (174)

Wafer-Level Transfer of GaN-on-Si Light-Emitting Devices via SiO₂-SiO₂ Direct Bonding: Strain Evolution and Optoelectronic Performance. [PDF]

Micromachines (Basel)
Zhang S, Zhang S, Fan Q, Ni X, Gu X.
europepmc   +1 more source

Controllable Synthesis of Monodisperse CeO₂ Nanoparticles with Tunable Sizes for Chemical-Mechanical Polishing. [PDF]

ACS Omega
Ma Y, Qiu T, Zhao Z, Zou Q, Chen B, Sun Q, Zhao S.   +6 more
europepmc   +1 more source

Oxide Planarization of Trench Structure using Chemical Mechanical Polishing(CMP) [PDF]

Journal of the Korean Institute of Electrical and Electronic Material Engineers, 2002
openaire   +1 more source

Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy. [PDF]

Microsyst Nanoeng
Tian Z, Wang S, Li R, Sun X, Shen W, Liu S.   +5 more
europepmc   +1 more source

Two-Step Polishing Technique for Flat and Smooth Copper Substrates by Electrochemical and Chemical Etching. [PDF]

Micromachines (Basel)
Wang K, Chen X, Hou B, Xu P, Li Y, Liu X, Shi H, Zhang M, Wang H.   +8 more
europepmc   +1 more source

Controlled Synthesis and Formation Mechanism of Uniformly Sized Spherical CeO₂ Nanoparticles. [PDF]

Materials (Basel)
Xie J, Feng K, Ye R, Wang M, Wang Y, Fan X, Liu R.   +6 more
europepmc   +1 more source

Void-free Cu/dielectric hybrid bonding at low-temperature enabled by ultrathin metal passivation engineering for 3D-IC applications. [PDF]

Commun Eng
Cheemalamarri HK, Fujino M, Ghosh T, Umralkar RB, B S S CR, Singh N, Vempati SR.   +6 more
europepmc   +1 more source

Improving 3C-SiC Quality Through Wafer-Bonded Switchback Epitaxy. [PDF]

Materials (Basel)
Colston G, Perera KH, Renz A, Gammon P, Antoniou M, Mawby PA, Shah VA.   +6 more
europepmc   +1 more source

Chemical Mechanical Polishing of Zerodur^® Using Silica and Ceria Nanoparticles: Toward Ultra-Smooth Optical Surfaces. [PDF]

Nanomaterials (Basel)
Bellahsene H, Sene S, Félix G, Fabregue N, Marcos M, Uhart A, Dupin JC, Oliviero E, Larionova J, Ferrari M, Guari Y.   +10 more
europepmc   +1 more source

Methods for Enhancing the Formation of Hydroxyl Radicals When Polishing Single Crystal SiC. [PDF]

Materials (Basel)
Shi D, Feng K, Zhao T.
europepmc   +1 more source