Results 61 to 70 of about 1,057 (152)

Finishing of Glass Balls by Chemical Mechanical Polishing (CMP) Using Cerium Oxide - Expanding the Process Capabilities of Magnetic Float Polishing (MFP) Technology

, 1999
Ahutosh Mohan Khuperkar
openalex   +1 more source

Improvement in the planarization of 4H-SiC(0001) achieved by photo-assisted chemical mechanical polishing (P-CMP) using nano TiO ₂-based composite abrasive with heterostructure

Shi-Dong Chen, Hong Lei
openalex   +1 more source

Effects of Hydrolysis Reaction and Abrasive Drag Force Accelerator on Enhancing Si-Wafer Polishing Rate and Improving Si-Wafer Surface Roughness. [PDF]

Nanomaterials (Basel)
Jeon MU, Kim PS, Han MH, Lee SH, Lee HM, Kim SB, Park JH, Cho KC, Park J, Park JG.   +9 more
europepmc   +1 more source

Rice Husk Fiber-Based Polishing Pad for Chemical Mechanical Polishing (CMP) of Sapphire

Sethavut Duangchan, Natthaphon Bun-Athuek, Mighttho Ketsuwan, Muhammad Mudden, Panart Khajornrungruang, K. Suzuki   +5 more
openalex   +1 more source

Chemical Mechanical Polishing (CMP) of Doped and Undoped Ceramic and Polymeric Dielectric Materials for Microelectronic Applications [PDF]

, 2006
Parshuram B. Zantye, Ashok Kumar, Jiro Yota   +2 more
openalex   +1 more source

Controllable Synthesis of Monodisperse CeO₂ Nanoparticles with Tunable Sizes for Chemical-Mechanical Polishing. [PDF]

ACS Omega
Ma Y, Qiu T, Zhao Z, Zou Q, Chen B, Sun Q, Zhao S.   +6 more
europepmc   +1 more source

Agent based diagnostic system for the defect analysis during chemical mechanical polishing (CMP)

, 2005
Akhauri Prakash Kumar
openalex   +2 more sources

Controlled Synthesis and Formation Mechanism of Uniformly Sized Spherical CeO₂ Nanoparticles. [PDF]

Materials (Basel)
Xie J, Feng K, Ye R, Wang M, Wang Y, Fan X, Liu R.   +6 more
europepmc   +1 more source

Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy. [PDF]

Microsyst Nanoeng
Tian Z, Wang S, Li R, Sun X, Shen W, Liu S.   +5 more
europepmc   +1 more source

Chemical mechanical polishing as an alternative surface treatment technique for corrosion prevention of carbon steel in an acidic medium. [PDF]

Sci Rep
Ahmed M, Ali Al-Timimi B, Al-Ali M, Abdullah GH, Khalaf Atiyaha S, Yaseen Ali Aljanabi A, Mel M.   +6 more
europepmc   +1 more source